JPS55104328A - Macromolecular material having clear conducting film and production thereof - Google Patents

Macromolecular material having clear conducting film and production thereof

Info

Publication number
JPS55104328A
JPS55104328A JP1260479A JP1260479A JPS55104328A JP S55104328 A JPS55104328 A JP S55104328A JP 1260479 A JP1260479 A JP 1260479A JP 1260479 A JP1260479 A JP 1260479A JP S55104328 A JPS55104328 A JP S55104328A
Authority
JP
Japan
Prior art keywords
conducting film
macromolecular material
electric field
oxide
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1260479A
Other languages
Japanese (ja)
Inventor
Tetsuo Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP1260479A priority Critical patent/JPS55104328A/en
Publication of JPS55104328A publication Critical patent/JPS55104328A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation

Abstract

PURPOSE:To obtain a macromolecular material having clear conducting film without distortion and change of properties by a method wherein a metal or an oxide thereof is vaporized in an atmosphere contg. oxygen under reduced pressure, the vaporized particles of the metal are excited and ionized by the irradiation of thermoelectron and the application of DC or AC electric field, and the ionized particles are accelerated by DC electric field between the vaporization source of the metal and a drawing electrode to form clear conducting film on the macromolecular material. CONSTITUTION:A metal or an oxide 10 thereof is vaporized in an atmosphere contg. oxygen under reduced pressure. Thermoelectron is irradiated from a filament 7 provided in the neighborhood of vaporization source. Further, an ionization electrode 8 is provided so that the vaporization source 10 becomes negative. DC electric field is applied to the electrode 8, or AC electric field is applied between the vaporization source 10 and the ionization electrode 8, thereby vaporized particles are excited and ionized. The ionized particles are accelerated by DC electric field between the vaporization source 10 and a drawing electrode 6 to form clear conducting film on a macromolecular material 3. By introducing oxygen through an introducing port 9 into the atmosphere, the vapor of metal element is converted to an oxide, or the vapor of the oxide 10 is converted to an oxide vapor to which oxygen decompsed by the irradiation of electron beam 11 is supplied, and the clear conducting film is formed on the macromolecular material 3.
JP1260479A 1979-02-06 1979-02-06 Macromolecular material having clear conducting film and production thereof Pending JPS55104328A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1260479A JPS55104328A (en) 1979-02-06 1979-02-06 Macromolecular material having clear conducting film and production thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1260479A JPS55104328A (en) 1979-02-06 1979-02-06 Macromolecular material having clear conducting film and production thereof

Publications (1)

Publication Number Publication Date
JPS55104328A true JPS55104328A (en) 1980-08-09

Family

ID=11809949

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1260479A Pending JPS55104328A (en) 1979-02-06 1979-02-06 Macromolecular material having clear conducting film and production thereof

Country Status (1)

Country Link
JP (1) JPS55104328A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4336277A (en) * 1980-09-29 1982-06-22 The Regents Of The University Of California Transparent electrical conducting films by activated reactive evaporation
US5264394A (en) * 1991-05-22 1993-11-23 Associated Universities, Inc. Method for producing high quality oxide films on substrates
US5601652A (en) * 1989-08-03 1997-02-11 United Technologies Corporation Apparatus for applying ceramic coatings
US5804258A (en) * 1996-01-10 1998-09-08 Alusuisse Technology & Management Ltd. Process and device for coating a substrate surface with vaporized inorganic material

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4336277A (en) * 1980-09-29 1982-06-22 The Regents Of The University Of California Transparent electrical conducting films by activated reactive evaporation
US5601652A (en) * 1989-08-03 1997-02-11 United Technologies Corporation Apparatus for applying ceramic coatings
US5264394A (en) * 1991-05-22 1993-11-23 Associated Universities, Inc. Method for producing high quality oxide films on substrates
US5804258A (en) * 1996-01-10 1998-09-08 Alusuisse Technology & Management Ltd. Process and device for coating a substrate surface with vaporized inorganic material

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