JPS56124131A - Production of magnetic recording medium - Google Patents

Production of magnetic recording medium

Info

Publication number
JPS56124131A
JPS56124131A JP2854480A JP2854480A JPS56124131A JP S56124131 A JPS56124131 A JP S56124131A JP 2854480 A JP2854480 A JP 2854480A JP 2854480 A JP2854480 A JP 2854480A JP S56124131 A JPS56124131 A JP S56124131A
Authority
JP
Japan
Prior art keywords
cobalt
crucible
base material
cluster
ion source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2854480A
Other languages
Japanese (ja)
Other versions
JPS6037526B2 (en
Inventor
Shinsaku Nakada
Toshinori Takagi
Yoichi Mikami
Kazuhiro Fukaya
Masahiro Hotta
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sekisui Chemical Co Ltd
Original Assignee
Sekisui Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sekisui Chemical Co Ltd filed Critical Sekisui Chemical Co Ltd
Priority to JP2854480A priority Critical patent/JPS6037526B2/en
Publication of JPS56124131A publication Critical patent/JPS56124131A/en
Publication of JPS6037526B2 publication Critical patent/JPS6037526B2/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/221—Ion beam deposition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • H01F41/20—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)

Abstract

PURPOSE:To obtain a thin alloy film type magnetic recording medium which has a magnetic characteristic adapted to high-density recording and is superior in durability, by using a cluster ion source and an ion source, which generates ions of atomic evaporation particles, in conbination as the evaporation source. CONSTITUTION:The vacuum tank having nonmagnetic base material 7, cluster ion source 4 having a lumo of cobalt metal in crucible 11, and evaporation source 5 having an element other than cobalt in crucible 22 is evacuated to a high vacuum of 10-4-10<-8> Torr, and heater 12 is heated by power supply to jet the cobalt vapor from injection nozzle 10, and the formed cluster is jetted onto base material 7 as cluster ions by the ionizing part consisting of filament 15 and mesh-shaped electrode 16, and simultaneously, the element other than cobalt which is heated through current supply and is accelerated through the electric field by filament 23 is vapor- deposited onto base material 7 from crucible 22, thereby forming a cobalt alloy thin film.
JP2854480A 1980-03-05 1980-03-05 Method for manufacturing magnetic recording media Expired JPS6037526B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2854480A JPS6037526B2 (en) 1980-03-05 1980-03-05 Method for manufacturing magnetic recording media

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2854480A JPS6037526B2 (en) 1980-03-05 1980-03-05 Method for manufacturing magnetic recording media

Publications (2)

Publication Number Publication Date
JPS56124131A true JPS56124131A (en) 1981-09-29
JPS6037526B2 JPS6037526B2 (en) 1985-08-27

Family

ID=12251596

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2854480A Expired JPS6037526B2 (en) 1980-03-05 1980-03-05 Method for manufacturing magnetic recording media

Country Status (1)

Country Link
JP (1) JPS6037526B2 (en)

Also Published As

Publication number Publication date
JPS6037526B2 (en) 1985-08-27

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