JPS62216112A - 透明導電膜の製造方法 - Google Patents

透明導電膜の製造方法

Info

Publication number
JPS62216112A
JPS62216112A JP5294786A JP5294786A JPS62216112A JP S62216112 A JPS62216112 A JP S62216112A JP 5294786 A JP5294786 A JP 5294786A JP 5294786 A JP5294786 A JP 5294786A JP S62216112 A JPS62216112 A JP S62216112A
Authority
JP
Japan
Prior art keywords
substrate
transparent conductive
conductive film
base material
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5294786A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0542764B2 (enrdf_load_stackoverflow
Inventor
田崎　明
誠 吉田
秀一 安食
和弘 宮本
和夫 梅田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Stanley Electric Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
Stanley Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Nippon Printing Co Ltd, Stanley Electric Co Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to JP5294786A priority Critical patent/JPS62216112A/ja
Publication of JPS62216112A publication Critical patent/JPS62216112A/ja
Publication of JPH0542764B2 publication Critical patent/JPH0542764B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Electric Cables (AREA)
JP5294786A 1986-03-11 1986-03-11 透明導電膜の製造方法 Granted JPS62216112A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5294786A JPS62216112A (ja) 1986-03-11 1986-03-11 透明導電膜の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5294786A JPS62216112A (ja) 1986-03-11 1986-03-11 透明導電膜の製造方法

Publications (2)

Publication Number Publication Date
JPS62216112A true JPS62216112A (ja) 1987-09-22
JPH0542764B2 JPH0542764B2 (enrdf_load_stackoverflow) 1993-06-29

Family

ID=12929066

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5294786A Granted JPS62216112A (ja) 1986-03-11 1986-03-11 透明導電膜の製造方法

Country Status (1)

Country Link
JP (1) JPS62216112A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6059937A (en) * 1995-12-22 2000-05-09 Korea Gas Corporation Sensor having tin oxide thin film for detecting methane gas and propane gas, and process for manufacturing thereof

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59200757A (ja) * 1983-04-26 1984-11-14 Konishiroku Photo Ind Co Ltd 蒸着方法
JPS60132319A (ja) * 1983-12-20 1985-07-15 Fuji Xerox Co Ltd 薄膜形成方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59200757A (ja) * 1983-04-26 1984-11-14 Konishiroku Photo Ind Co Ltd 蒸着方法
JPS60132319A (ja) * 1983-12-20 1985-07-15 Fuji Xerox Co Ltd 薄膜形成方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6059937A (en) * 1995-12-22 2000-05-09 Korea Gas Corporation Sensor having tin oxide thin film for detecting methane gas and propane gas, and process for manufacturing thereof

Also Published As

Publication number Publication date
JPH0542764B2 (enrdf_load_stackoverflow) 1993-06-29

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