JPH0542763B2 - - Google Patents

Info

Publication number
JPH0542763B2
JPH0542763B2 JP60096073A JP9607385A JPH0542763B2 JP H0542763 B2 JPH0542763 B2 JP H0542763B2 JP 60096073 A JP60096073 A JP 60096073A JP 9607385 A JP9607385 A JP 9607385A JP H0542763 B2 JPH0542763 B2 JP H0542763B2
Authority
JP
Japan
Prior art keywords
transparent conductive
film
conductive film
tin oxide
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60096073A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61256506A (ja
Inventor
Shizuko Katsube
Takahiro Aoyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daihen Corp
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Daihen Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Daihen Corp filed Critical Agency of Industrial Science and Technology
Priority to JP60096073A priority Critical patent/JPS61256506A/ja
Publication of JPS61256506A publication Critical patent/JPS61256506A/ja
Publication of JPH0542763B2 publication Critical patent/JPH0542763B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Non-Insulated Conductors (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Electric Cables (AREA)
  • Liquid Crystal (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
  • Surface Treatment Of Glass (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Photovoltaic Devices (AREA)
JP60096073A 1985-05-08 1985-05-08 低抵抗透明導電膜の生成方法 Granted JPS61256506A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60096073A JPS61256506A (ja) 1985-05-08 1985-05-08 低抵抗透明導電膜の生成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60096073A JPS61256506A (ja) 1985-05-08 1985-05-08 低抵抗透明導電膜の生成方法

Publications (2)

Publication Number Publication Date
JPS61256506A JPS61256506A (ja) 1986-11-14
JPH0542763B2 true JPH0542763B2 (enrdf_load_stackoverflow) 1993-06-29

Family

ID=14155227

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60096073A Granted JPS61256506A (ja) 1985-05-08 1985-05-08 低抵抗透明導電膜の生成方法

Country Status (1)

Country Link
JP (1) JPS61256506A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007055231A1 (ja) * 2005-11-09 2007-05-18 Mitsui Mining & Smelting Co., Ltd. ＳｎＯ２系スパッタリングターゲットおよびその製造方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009205799A (ja) * 2006-06-06 2009-09-10 Asahi Glass Co Ltd 透明導電膜およびその製造方法、ならびにその製造に使用されるスパッタリングターゲット
US7452488B2 (en) 2006-10-31 2008-11-18 H.C. Starck Inc. Tin oxide-based sputtering target, low resistivity, transparent conductive film, method for producing such film and composition for use therein
KR101630118B1 (ko) 2014-03-07 2016-06-13 주식회사 엘지화학 광변조 장치

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4065743A (en) * 1975-03-21 1977-12-27 Trw, Inc. Resistor material, resistor made therefrom and method of making the same
JPS5537804A (en) * 1978-09-05 1980-03-17 Tokyo Shibaura Electric Co Door unit for enclosed switchboard
NL8303183A (nl) * 1983-09-15 1985-04-01 Philips Nv Werkwijze voor het aanbrengen van een transparante laag op een substraat.

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007055231A1 (ja) * 2005-11-09 2007-05-18 Mitsui Mining & Smelting Co., Ltd. ＳｎＯ２系スパッタリングターゲットおよびその製造方法
JP2007131891A (ja) * 2005-11-09 2007-05-31 Mitsui Mining & Smelting Co Ltd ＳｎＯ２系スパッタリングターゲットおよびその製造方法

Also Published As

Publication number Publication date
JPS61256506A (ja) 1986-11-14

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term