JPH0541546Y2 - - Google Patents

Info

Publication number
JPH0541546Y2
JPH0541546Y2 JP11444884U JP11444884U JPH0541546Y2 JP H0541546 Y2 JPH0541546 Y2 JP H0541546Y2 JP 11444884 U JP11444884 U JP 11444884U JP 11444884 U JP11444884 U JP 11444884U JP H0541546 Y2 JPH0541546 Y2 JP H0541546Y2
Authority
JP
Japan
Prior art keywords
processed
vacuum
chamber
drying
load lock
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP11444884U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6130233U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11444884U priority Critical patent/JPS6130233U/ja
Publication of JPS6130233U publication Critical patent/JPS6130233U/ja
Application granted granted Critical
Publication of JPH0541546Y2 publication Critical patent/JPH0541546Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
JP11444884U 1984-07-27 1984-07-27 真空処理装置 Granted JPS6130233U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11444884U JPS6130233U (ja) 1984-07-27 1984-07-27 真空処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11444884U JPS6130233U (ja) 1984-07-27 1984-07-27 真空処理装置

Publications (2)

Publication Number Publication Date
JPS6130233U JPS6130233U (ja) 1986-02-24
JPH0541546Y2 true JPH0541546Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-10-20

Family

ID=30673466

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11444884U Granted JPS6130233U (ja) 1984-07-27 1984-07-27 真空処理装置

Country Status (1)

Country Link
JP (1) JPS6130233U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6384238B2 (ja) * 2014-09-29 2018-09-05 日立金属株式会社 乾燥機およびそれを用いた磁石片の乾燥方法

Also Published As

Publication number Publication date
JPS6130233U (ja) 1986-02-24

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