JPH053923Y2 - - Google Patents
Info
- Publication number
- JPH053923Y2 JPH053923Y2 JP13703387U JP13703387U JPH053923Y2 JP H053923 Y2 JPH053923 Y2 JP H053923Y2 JP 13703387 U JP13703387 U JP 13703387U JP 13703387 U JP13703387 U JP 13703387U JP H053923 Y2 JPH053923 Y2 JP H053923Y2
- Authority
- JP
- Japan
- Prior art keywords
- chip
- holding surface
- microscope
- angle
- chips
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007689 inspection Methods 0.000 claims description 11
- 230000003287 optical effect Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13703387U JPH053923Y2 (en, 2012) | 1987-09-08 | 1987-09-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13703387U JPH053923Y2 (en, 2012) | 1987-09-08 | 1987-09-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6442404U JPS6442404U (en, 2012) | 1989-03-14 |
| JPH053923Y2 true JPH053923Y2 (en, 2012) | 1993-01-29 |
Family
ID=31398096
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13703387U Expired - Lifetime JPH053923Y2 (en, 2012) | 1987-09-08 | 1987-09-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH053923Y2 (en, 2012) |
-
1987
- 1987-09-08 JP JP13703387U patent/JPH053923Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6442404U (en, 2012) | 1989-03-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS62191814A (ja) | スライド標本載置装置 | |
| US5192908A (en) | Semiconductor device testing apparatus with positioning mechanism | |
| JPH053923Y2 (en, 2012) | ||
| JP3492859B2 (ja) | ウエハー形状測定装置 | |
| JP3247495B2 (ja) | 基板処理装置、基板移載機の位置設定方法、及びボートの状態検出方法 | |
| JP2008279526A (ja) | チャックテーブルの支持機構およびチャックテーブル機構 | |
| WO2007023605A1 (ja) | 表面粗さ／輪郭形状測定装置 | |
| JPH08162509A (ja) | プロ−ブ装置およびプロ−ブ方法 | |
| JP2516377B2 (ja) | プロ−ブ装置 | |
| JP3185295B2 (ja) | マーキング装置 | |
| JPH09326426A (ja) | ウェーハの検査装置および方法 | |
| JPH0562699B2 (en, 2012) | ||
| JPH0316098Y2 (en, 2012) | ||
| JPH0729481Y2 (ja) | 斜光検査台 | |
| JPH0645652A (ja) | 光学ヘッドのダイボンディング装置及びダイボンディング方法 | |
| JPS60178639A (ja) | ペレツト選別装置 | |
| JPS6367247U (en, 2012) | ||
| JPS614968A (ja) | プロ−ブ装置及びプロ−ブカ−ド | |
| JPS63138746A (ja) | フラツトパツケ−ジｉｃのリ−ドピンの状態検査装置 | |
| JPH01246842A (ja) | 半導体ウエハの位置合せ装置 | |
| JPH0731364Y2 (ja) | 磁気ヘッド用チップのクランプ装置 | |
| JPH02167419A (ja) | 曲率測定機 | |
| JPH01272902A (ja) | 曲率測定装置 | |
| TWM591166U (zh) | 載盤翻面檢測系統 | |
| JPH02247517A (ja) | 三次元測定装置 |