JPH0562699B2 - - Google Patents
Info
- Publication number
- JPH0562699B2 JPH0562699B2 JP60005487A JP548785A JPH0562699B2 JP H0562699 B2 JPH0562699 B2 JP H0562699B2 JP 60005487 A JP60005487 A JP 60005487A JP 548785 A JP548785 A JP 548785A JP H0562699 B2 JPH0562699 B2 JP H0562699B2
- Authority
- JP
- Japan
- Prior art keywords
- probe
- probe card
- wafer
- substrate
- camera
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60005487A JPS61164165A (ja) | 1985-01-16 | 1985-01-16 | プロ−ブ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60005487A JPS61164165A (ja) | 1985-01-16 | 1985-01-16 | プロ−ブ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61164165A JPS61164165A (ja) | 1986-07-24 |
| JPH0562699B2 true JPH0562699B2 (en, 2012) | 1993-09-09 |
Family
ID=11612598
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60005487A Granted JPS61164165A (ja) | 1985-01-16 | 1985-01-16 | プロ−ブ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61164165A (en, 2012) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0626228B2 (ja) * | 1986-11-07 | 1994-04-06 | 東京エレクトロン株式会社 | プローブ装置 |
| JPS63204153A (ja) * | 1987-02-19 | 1988-08-23 | Tokyo Electron Ltd | プロ−ブ装置 |
| JP2583781B2 (ja) * | 1987-07-21 | 1997-02-19 | 東京エレクトロン株式会社 | プローブカード及びプローブ装置 |
| JPH0743428A (ja) * | 1993-07-28 | 1995-02-14 | Nec Corp | 基板検査用位置合わせ装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS614968A (ja) * | 1984-06-19 | 1986-01-10 | Canon Inc | プロ−ブ装置及びプロ−ブカ−ド |
-
1985
- 1985-01-16 JP JP60005487A patent/JPS61164165A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61164165A (ja) | 1986-07-24 |
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