JPH0538821Y2 - - Google Patents
Info
- Publication number
- JPH0538821Y2 JPH0538821Y2 JP1988100226U JP10022688U JPH0538821Y2 JP H0538821 Y2 JPH0538821 Y2 JP H0538821Y2 JP 1988100226 U JP1988100226 U JP 1988100226U JP 10022688 U JP10022688 U JP 10022688U JP H0538821 Y2 JPH0538821 Y2 JP H0538821Y2
- Authority
- JP
- Japan
- Prior art keywords
- filter
- clean room
- air
- ceiling
- clean
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000463 material Substances 0.000 claims description 10
- 238000004080 punching Methods 0.000 description 11
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000007664 blowing Methods 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 238000004887 air purification Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988100226U JPH0538821Y2 (US06312121-20011106-C00033.png) | 1988-07-27 | 1988-07-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988100226U JPH0538821Y2 (US06312121-20011106-C00033.png) | 1988-07-27 | 1988-07-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0220918U JPH0220918U (US06312121-20011106-C00033.png) | 1990-02-13 |
| JPH0538821Y2 true JPH0538821Y2 (US06312121-20011106-C00033.png) | 1993-09-30 |
Family
ID=31328116
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988100226U Expired - Lifetime JPH0538821Y2 (US06312121-20011106-C00033.png) | 1988-07-27 | 1988-07-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0538821Y2 (US06312121-20011106-C00033.png) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2004114378A1 (ja) * | 2003-06-19 | 2006-07-27 | 北海道ティー・エル・オー株式会社 | クリーンユニット、クリーンユニットシステム、機能ユニット、機能ユニットシステム、材料処理方法、素子製造方法、細胞系育成方法および植物体育成方法 |
| JP6284806B2 (ja) * | 2014-03-31 | 2018-02-28 | 日本無機株式会社 | フィルタエレメント、フィルタエレメント組立体、および空気清浄システム |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6115023B2 (US06312121-20011106-C00033.png) * | 1977-07-08 | 1986-04-22 | Betsukaa Yoozefu |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6115023U (ja) * | 1984-07-04 | 1986-01-28 | 富士電機株式会社 | 防じんフイルタ−支持装置 |
| JPS62144526U (US06312121-20011106-C00033.png) * | 1986-03-07 | 1987-09-11 | ||
| JPH0415296Y2 (US06312121-20011106-C00033.png) * | 1987-01-12 | 1992-04-07 |
-
1988
- 1988-07-27 JP JP1988100226U patent/JPH0538821Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6115023B2 (US06312121-20011106-C00033.png) * | 1977-07-08 | 1986-04-22 | Betsukaa Yoozefu |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0220918U (US06312121-20011106-C00033.png) | 1990-02-13 |
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