JPH0535327B2 - - Google Patents
Info
- Publication number
- JPH0535327B2 JPH0535327B2 JP60287330A JP28733085A JPH0535327B2 JP H0535327 B2 JPH0535327 B2 JP H0535327B2 JP 60287330 A JP60287330 A JP 60287330A JP 28733085 A JP28733085 A JP 28733085A JP H0535327 B2 JPH0535327 B2 JP H0535327B2
- Authority
- JP
- Japan
- Prior art keywords
- area
- air
- clean
- cleanliness
- air supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000009423 ventilation Methods 0.000 claims description 25
- 230000003749 cleanliness Effects 0.000 claims description 23
- 238000005192 partition Methods 0.000 claims description 22
- 238000004519 manufacturing process Methods 0.000 description 24
- 239000000428 dust Substances 0.000 description 14
- 238000012423 maintenance Methods 0.000 description 10
- 239000004065 semiconductor Substances 0.000 description 10
- 230000000694 effects Effects 0.000 description 3
- 238000011045 prefiltration Methods 0.000 description 3
- 238000007664 blowing Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Ventilation (AREA)
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60287330A JPS62147250A (ja) | 1985-12-20 | 1985-12-20 | クリ−ンル−ム |
US07/057,525 US4838150A (en) | 1985-11-26 | 1986-11-26 | Clean room |
PCT/JP1986/000603 WO1987003356A1 (en) | 1985-11-26 | 1986-11-26 | Clean room |
DE8686906948T DE3683492D1 (de) | 1985-11-26 | 1986-11-26 | Reinraum. |
EP86906948A EP0250596B1 (en) | 1985-11-26 | 1986-11-26 | Clean room |
CA000525873A CA1280929C (en) | 1985-12-19 | 1986-12-19 | Clean room |
KR870700365A KR880700218A (ko) | 1985-11-26 | 1987-04-27 | 크린 룸 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60287330A JPS62147250A (ja) | 1985-12-20 | 1985-12-20 | クリ−ンル−ム |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62147250A JPS62147250A (ja) | 1987-07-01 |
JPH0535327B2 true JPH0535327B2 (zh) | 1993-05-26 |
Family
ID=17715965
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60287330A Granted JPS62147250A (ja) | 1985-11-26 | 1985-12-20 | クリ−ンル−ム |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62147250A (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0666439A (ja) * | 1992-08-13 | 1994-03-08 | Kawasaki Steel Corp | クリーンルーム及びエアサプライユニット |
JP2005340435A (ja) | 2004-05-26 | 2005-12-08 | Alps Electric Co Ltd | クリーンユニット |
JP5606148B2 (ja) * | 2010-05-17 | 2014-10-15 | 信越化学工業株式会社 | クリーンルーム内製品保管用ストッカー |
-
1985
- 1985-12-20 JP JP60287330A patent/JPS62147250A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS62147250A (ja) | 1987-07-01 |
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