JPS62147250A - クリ−ンル−ム - Google Patents
クリ−ンル−ムInfo
- Publication number
- JPS62147250A JPS62147250A JP60287330A JP28733085A JPS62147250A JP S62147250 A JPS62147250 A JP S62147250A JP 60287330 A JP60287330 A JP 60287330A JP 28733085 A JP28733085 A JP 28733085A JP S62147250 A JPS62147250 A JP S62147250A
- Authority
- JP
- Japan
- Prior art keywords
- area
- air
- ceiling
- equipment
- air supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Ventilation (AREA)
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60287330A JPS62147250A (ja) | 1985-12-20 | 1985-12-20 | クリ−ンル−ム |
US07/057,525 US4838150A (en) | 1985-11-26 | 1986-11-26 | Clean room |
PCT/JP1986/000603 WO1987003356A1 (en) | 1985-11-26 | 1986-11-26 | Clean room |
DE8686906948T DE3683492D1 (de) | 1985-11-26 | 1986-11-26 | Reinraum. |
EP86906948A EP0250596B1 (en) | 1985-11-26 | 1986-11-26 | Clean room |
CA000525873A CA1280929C (en) | 1985-12-19 | 1986-12-19 | Clean room |
KR870700365A KR880700218A (ko) | 1985-11-26 | 1987-04-27 | 크린 룸 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60287330A JPS62147250A (ja) | 1985-12-20 | 1985-12-20 | クリ−ンル−ム |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62147250A true JPS62147250A (ja) | 1987-07-01 |
JPH0535327B2 JPH0535327B2 (zh) | 1993-05-26 |
Family
ID=17715965
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60287330A Granted JPS62147250A (ja) | 1985-11-26 | 1985-12-20 | クリ−ンル−ム |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62147250A (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0666439A (ja) * | 1992-08-13 | 1994-03-08 | Kawasaki Steel Corp | クリーンルーム及びエアサプライユニット |
KR100643252B1 (ko) | 2004-05-26 | 2006-11-10 | 알프스 덴키 가부시키가이샤 | 클린유닛 |
JP2011242503A (ja) * | 2010-05-17 | 2011-12-01 | Shin Etsu Chem Co Ltd | クリーンルーム内製品保管用ストッカー |
-
1985
- 1985-12-20 JP JP60287330A patent/JPS62147250A/ja active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0666439A (ja) * | 1992-08-13 | 1994-03-08 | Kawasaki Steel Corp | クリーンルーム及びエアサプライユニット |
KR100643252B1 (ko) | 2004-05-26 | 2006-11-10 | 알프스 덴키 가부시키가이샤 | 클린유닛 |
JP2011242503A (ja) * | 2010-05-17 | 2011-12-01 | Shin Etsu Chem Co Ltd | クリーンルーム内製品保管用ストッカー |
Also Published As
Publication number | Publication date |
---|---|
JPH0535327B2 (zh) | 1993-05-26 |
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