JPH0533496B2 - - Google Patents

Info

Publication number
JPH0533496B2
JPH0533496B2 JP60200651A JP20065185A JPH0533496B2 JP H0533496 B2 JPH0533496 B2 JP H0533496B2 JP 60200651 A JP60200651 A JP 60200651A JP 20065185 A JP20065185 A JP 20065185A JP H0533496 B2 JPH0533496 B2 JP H0533496B2
Authority
JP
Japan
Prior art keywords
ion beam
deflection
distortion
detection element
striped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60200651A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6261256A (ja
Inventor
Eizo Myauchi
Toshio Hashimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP60200651A priority Critical patent/JPS6261256A/ja
Publication of JPS6261256A publication Critical patent/JPS6261256A/ja
Publication of JPH0533496B2 publication Critical patent/JPH0533496B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP60200651A 1985-09-12 1985-09-12 イオンビ−ムにおける偏向歪の修正方法とこの方法に使用する偏向歪検出素子 Granted JPS6261256A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60200651A JPS6261256A (ja) 1985-09-12 1985-09-12 イオンビ−ムにおける偏向歪の修正方法とこの方法に使用する偏向歪検出素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60200651A JPS6261256A (ja) 1985-09-12 1985-09-12 イオンビ−ムにおける偏向歪の修正方法とこの方法に使用する偏向歪検出素子

Publications (2)

Publication Number Publication Date
JPS6261256A JPS6261256A (ja) 1987-03-17
JPH0533496B2 true JPH0533496B2 (enExample) 1993-05-19

Family

ID=16427945

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60200651A Granted JPS6261256A (ja) 1985-09-12 1985-09-12 イオンビ−ムにおける偏向歪の修正方法とこの方法に使用する偏向歪検出素子

Country Status (1)

Country Link
JP (1) JPS6261256A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4818873A (en) * 1987-10-30 1989-04-04 Vickers Instruments (Canada) Inc. Apparatus for automatically controlling the magnification factor of a scanning electron microscope
JP5302048B2 (ja) * 2009-02-27 2013-10-02 株式会社神戸製鋼所 イオン源におけるビーム照射電極の被膜除去装置、これを備えたイオン源、及びビーム照射電極の被膜除去用部材

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55112059A (en) * 1979-02-22 1980-08-29 Nec Corp Clock extracting circuit
JPS56112059A (en) * 1980-02-08 1981-09-04 Jeol Ltd Electron beam device
JPS56124234A (en) * 1980-03-05 1981-09-29 Hitachi Ltd Correcting method for electron beam deflection

Also Published As

Publication number Publication date
JPS6261256A (ja) 1987-03-17

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term