JPS56112059A - Electron beam device - Google Patents

Electron beam device

Info

Publication number
JPS56112059A
JPS56112059A JP1436080A JP1436080A JPS56112059A JP S56112059 A JPS56112059 A JP S56112059A JP 1436080 A JP1436080 A JP 1436080A JP 1436080 A JP1436080 A JP 1436080A JP S56112059 A JPS56112059 A JP S56112059A
Authority
JP
Japan
Prior art keywords
signal
circuit
automatic focusing
scanning
integrating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1436080A
Other languages
Japanese (ja)
Inventor
Fumio Kataki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP1436080A priority Critical patent/JPS56112059A/en
Publication of JPS56112059A publication Critical patent/JPS56112059A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)

Abstract

PURPOSE:To perform good automatic focusing in a scan type electron microscope, by defferentiating the signal produced through scanning then integrating the differentiated signal and after performing envelope detection utilizing a signal for performing the automatic focusing. CONSTITUTION:A switch circuit 23 is functioned to supply a sinusoidal wave from an oscillator 21 through an adder 24 to an exciting power source 25 for an auxiliary lens 4. Scanning signal is supplied from a scanning signal generating circuit 7 to scan a specimen 5 with an electron beam EB. Then the output signal from a secondary electron detector 11 is defferentiated by a differentiating circuit 15 and integrated by an integrating circuit 17, and after detecting by a develope detector 19 the phase difference between the output signal from the oscillator 21 is compared by a phase discriminator 20. The output from the phase discriminator 20 is provided through an integrating circuit 22 and an adder 24 to an exciting power source 25 to control the current supplied to the auxilliary lens 4 thus to perform the automatic focusing.
JP1436080A 1980-02-08 1980-02-08 Electron beam device Pending JPS56112059A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1436080A JPS56112059A (en) 1980-02-08 1980-02-08 Electron beam device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1436080A JPS56112059A (en) 1980-02-08 1980-02-08 Electron beam device

Publications (1)

Publication Number Publication Date
JPS56112059A true JPS56112059A (en) 1981-09-04

Family

ID=11858889

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1436080A Pending JPS56112059A (en) 1980-02-08 1980-02-08 Electron beam device

Country Status (1)

Country Link
JP (1) JPS56112059A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6261256A (en) * 1985-09-12 1987-03-17 Agency Of Ind Science & Technol Correction method for deflective distortion of ion beam, and deflective distortion detector therefor
US8049189B2 (en) 2005-10-20 2011-11-01 Carl Zeiss Sms Gmbh Charged particle system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6261256A (en) * 1985-09-12 1987-03-17 Agency Of Ind Science & Technol Correction method for deflective distortion of ion beam, and deflective distortion detector therefor
JPH0533496B2 (en) * 1985-09-12 1993-05-19 Kogyo Gijutsuin
US8049189B2 (en) 2005-10-20 2011-11-01 Carl Zeiss Sms Gmbh Charged particle system

Similar Documents

Publication Publication Date Title
JPS5457949A (en) Automatic focusing unit for scanning electron microscope and so on
JPS5730253A (en) Secondary electron detector for scan type electron microscope
JPS56112059A (en) Electron beam device
JPS56165255A (en) Image indicating method for transmission scan electron microscope
JPS54114173A (en) Electronic probe device
JPS556737A (en) Scan electron microscope
JPS5581096A (en) Laser welding control method
JPS54129968A (en) Electron gun
JPS5638761A (en) Setting of magnetic field in mass spectrometer
JPS5719948A (en) Electron beam device
JPS5551349A (en) Sodium ionization detector
JPS55144577A (en) Energy analyzer for electron ray
JPS571957A (en) Device for limiting charge on surface of solid
JPS571587A (en) Electron beam welding device
JPS52128053A (en) Electron microscope
JPS5671589A (en) Charged particle beam processing device
JPS57151827A (en) Level detector for molten metal
JPS56116259A (en) Transmissive electron microscope
JPS5541736A (en) Detection of mark location
JPS57111456A (en) Voltage measuring device using electronic beam
JPS5773606A (en) Detector for tip shape of fine body
JPS54100661A (en) Focusing unit of electron-beam device
JPS54128288A (en) Electron beam exposure device
FLESNER Scanning electron microscopy by photovoltage contrast imaging(Patent)
JPS5457948A (en) Automatic focusing unit for scanning electron microscope and so on