JPH0533487B2 - - Google Patents
Info
- Publication number
- JPH0533487B2 JPH0533487B2 JP16872785A JP16872785A JPH0533487B2 JP H0533487 B2 JPH0533487 B2 JP H0533487B2 JP 16872785 A JP16872785 A JP 16872785A JP 16872785 A JP16872785 A JP 16872785A JP H0533487 B2 JPH0533487 B2 JP H0533487B2
- Authority
- JP
- Japan
- Prior art keywords
- emitter
- surface treatment
- treatment
- single crystal
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004381 surface treatment Methods 0.000 claims description 21
- 230000005684 electric field Effects 0.000 claims description 16
- 239000013078 crystal Substances 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 15
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 claims description 15
- 229910052717 sulfur Inorganic materials 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 239000004215 Carbon black (E152) Substances 0.000 claims description 4
- 229930195733 hydrocarbon Natural products 0.000 claims description 4
- 150000002430 hydrocarbons Chemical class 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 16
- 238000010438 heat treatment Methods 0.000 description 6
- 239000010410 layer Substances 0.000 description 4
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- 230000001747 exhibiting effect Effects 0.000 description 3
- 239000011593 sulfur Substances 0.000 description 3
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001093 holography Methods 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
Landscapes
- Cold Cathode And The Manufacture (AREA)
- Carbon And Carbon Compounds (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60168727A JPS6229032A (ja) | 1985-07-31 | 1985-07-31 | 高安定フイ−ルドエミツタ−の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60168727A JPS6229032A (ja) | 1985-07-31 | 1985-07-31 | 高安定フイ−ルドエミツタ−の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6229032A JPS6229032A (ja) | 1987-02-07 |
JPH0533487B2 true JPH0533487B2 (enrdf_load_stackoverflow) | 1993-05-19 |
Family
ID=15873302
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60168727A Granted JPS6229032A (ja) | 1985-07-31 | 1985-07-31 | 高安定フイ−ルドエミツタ−の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6229032A (enrdf_load_stackoverflow) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009300070A (ja) * | 2008-06-11 | 2009-12-24 | Kingtec Korea Co Ltd | ジャケット型個人冷房装置 |
-
1985
- 1985-07-31 JP JP60168727A patent/JPS6229032A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6229032A (ja) | 1987-02-07 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |