JPH03735B2 - - Google Patents

Info

Publication number
JPH03735B2
JPH03735B2 JP18050082A JP18050082A JPH03735B2 JP H03735 B2 JPH03735 B2 JP H03735B2 JP 18050082 A JP18050082 A JP 18050082A JP 18050082 A JP18050082 A JP 18050082A JP H03735 B2 JPH03735 B2 JP H03735B2
Authority
JP
Japan
Prior art keywords
field emitter
transition metal
electron beam
emitter
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP18050082A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5971232A (ja
Inventor
Yoshio Ishizawa
Chuhei Ooshima
Shigeki Ootani
Yukio Shibata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KAGAKU GIJUTSUCHO MUKIZAISHITSU KENKYUSHOCHO
Original Assignee
KAGAKU GIJUTSUCHO MUKIZAISHITSU KENKYUSHOCHO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KAGAKU GIJUTSUCHO MUKIZAISHITSU KENKYUSHOCHO filed Critical KAGAKU GIJUTSUCHO MUKIZAISHITSU KENKYUSHOCHO
Priority to JP57180500A priority Critical patent/JPS5971232A/ja
Publication of JPS5971232A publication Critical patent/JPS5971232A/ja
Publication of JPH03735B2 publication Critical patent/JPH03735B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Cold Cathode And The Manufacture (AREA)
JP57180500A 1982-10-14 1982-10-14 表面酸化型炭化物フィールドエミッターの製造法 Granted JPS5971232A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57180500A JPS5971232A (ja) 1982-10-14 1982-10-14 表面酸化型炭化物フィールドエミッターの製造法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57180500A JPS5971232A (ja) 1982-10-14 1982-10-14 表面酸化型炭化物フィールドエミッターの製造法

Publications (2)

Publication Number Publication Date
JPS5971232A JPS5971232A (ja) 1984-04-21
JPH03735B2 true JPH03735B2 (enrdf_load_stackoverflow) 1991-01-08

Family

ID=16084320

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57180500A Granted JPS5971232A (ja) 1982-10-14 1982-10-14 表面酸化型炭化物フィールドエミッターの製造法

Country Status (1)

Country Link
JP (1) JPS5971232A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7888654B2 (en) * 2007-01-24 2011-02-15 Fei Company Cold field emitter
US7828622B1 (en) * 2007-10-25 2010-11-09 Kla-Tencor Technologies Corporation Sharpening metal carbide emitters
JP5074902B2 (ja) * 2007-11-30 2012-11-14 電気化学工業株式会社 電子放出源
CN102629538B (zh) * 2012-04-13 2014-03-19 吴江炀晟阴极材料有限公司 具有低逸出功和高化学稳定性的电极材料

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS559775A (en) * 1978-07-08 1980-01-23 Toyosha Co Ltd Tilling device
JPS5661733A (en) * 1979-10-24 1981-05-27 Hitachi Ltd Field emission cathode and its manufacture

Also Published As

Publication number Publication date
JPS5971232A (ja) 1984-04-21

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