JPH0434253B2 - - Google Patents
Info
- Publication number
- JPH0434253B2 JPH0434253B2 JP27522184A JP27522184A JPH0434253B2 JP H0434253 B2 JPH0434253 B2 JP H0434253B2 JP 27522184 A JP27522184 A JP 27522184A JP 27522184 A JP27522184 A JP 27522184A JP H0434253 B2 JPH0434253 B2 JP H0434253B2
- Authority
- JP
- Japan
- Prior art keywords
- emitter
- field
- carbon film
- single crystal
- hydrocarbon gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 10
- 229910052799 carbon Inorganic materials 0.000 claims description 10
- 239000013078 crystal Substances 0.000 claims description 9
- 239000004215 Carbon black (E152) Substances 0.000 claims description 8
- 229930195733 hydrocarbon Natural products 0.000 claims description 8
- 150000002430 hydrocarbons Chemical class 0.000 claims description 8
- 230000005684 electric field Effects 0.000 claims description 7
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 5
- 230000001747 exhibiting effect Effects 0.000 claims description 3
- 238000010894 electron beam technology Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 2
- 239000005977 Ethylene Substances 0.000 description 2
- 125000004432 carbon atom Chemical group C* 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 125000003821 2-(trimethylsilyl)ethoxymethyl group Chemical group [H]C([H])([H])[Si](C([H])([H])[H])(C([H])([H])[H])C([H])([H])C(OC([H])([H])[*])([H])[H] 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000004626 scanning electron microscopy Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
- H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Cold Cathode And The Manufacture (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59275221A JPS61153918A (ja) | 1984-12-27 | 1984-12-27 | 高安定電子放射特性を示すフイ−ルドエミツタ−の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59275221A JPS61153918A (ja) | 1984-12-27 | 1984-12-27 | 高安定電子放射特性を示すフイ−ルドエミツタ−の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61153918A JPS61153918A (ja) | 1986-07-12 |
| JPH0434253B2 true JPH0434253B2 (enrdf_load_stackoverflow) | 1992-06-05 |
Family
ID=17552389
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59275221A Granted JPS61153918A (ja) | 1984-12-27 | 1984-12-27 | 高安定電子放射特性を示すフイ−ルドエミツタ−の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61153918A (enrdf_load_stackoverflow) |
-
1984
- 1984-12-27 JP JP59275221A patent/JPS61153918A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61153918A (ja) | 1986-07-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |