JPH0533093B2 - - Google Patents
Info
- Publication number
- JPH0533093B2 JPH0533093B2 JP59130143A JP13014384A JPH0533093B2 JP H0533093 B2 JPH0533093 B2 JP H0533093B2 JP 59130143 A JP59130143 A JP 59130143A JP 13014384 A JP13014384 A JP 13014384A JP H0533093 B2 JPH0533093 B2 JP H0533093B2
- Authority
- JP
- Japan
- Prior art keywords
- airtight
- opening
- chamber
- workpiece
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
- B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- ing And Chemical Polishing (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13014384A JPS6111132A (ja) | 1984-06-26 | 1984-06-26 | 真空装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13014384A JPS6111132A (ja) | 1984-06-26 | 1984-06-26 | 真空装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6111132A JPS6111132A (ja) | 1986-01-18 |
| JPH0533093B2 true JPH0533093B2 (enrdf_load_html_response) | 1993-05-18 |
Family
ID=15026995
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13014384A Granted JPS6111132A (ja) | 1984-06-26 | 1984-06-26 | 真空装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6111132A (enrdf_load_html_response) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5752859Y2 (enrdf_load_html_response) * | 1976-08-20 | 1982-11-16 |
-
1984
- 1984-06-26 JP JP13014384A patent/JPS6111132A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6111132A (ja) | 1986-01-18 |
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