JPH0530315B2 - - Google Patents

Info

Publication number
JPH0530315B2
JPH0530315B2 JP61183796A JP18379686A JPH0530315B2 JP H0530315 B2 JPH0530315 B2 JP H0530315B2 JP 61183796 A JP61183796 A JP 61183796A JP 18379686 A JP18379686 A JP 18379686A JP H0530315 B2 JPH0530315 B2 JP H0530315B2
Authority
JP
Japan
Prior art keywords
layer
etching
groove
semiconductor
type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61183796A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6338279A (ja
Inventor
Mototaka Tanetani
Akihiro Matsumoto
Kaneki Matsui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP18379686A priority Critical patent/JPS6338279A/ja
Publication of JPS6338279A publication Critical patent/JPS6338279A/ja
Publication of JPH0530315B2 publication Critical patent/JPH0530315B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Semiconductor Lasers (AREA)
JP18379686A 1986-08-04 1986-08-04 半導体レーザ装置の製造方法 Granted JPS6338279A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18379686A JPS6338279A (ja) 1986-08-04 1986-08-04 半導体レーザ装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18379686A JPS6338279A (ja) 1986-08-04 1986-08-04 半導体レーザ装置の製造方法

Publications (2)

Publication Number Publication Date
JPS6338279A JPS6338279A (ja) 1988-02-18
JPH0530315B2 true JPH0530315B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-05-07

Family

ID=16142070

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18379686A Granted JPS6338279A (ja) 1986-08-04 1986-08-04 半導体レーザ装置の製造方法

Country Status (1)

Country Link
JP (1) JPS6338279A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0649620U (ja) * 1992-04-28 1994-07-08 平尾鉄建株式会社 貫通孔を有する鉄筋コンクリート構造物の補強部材

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02209782A (ja) * 1989-02-09 1990-08-21 Hikari Keisoku Gijutsu Kaihatsu Kk リッジ導波路の製造方法
EP0619602A3 (en) * 1993-04-07 1995-01-25 Sony Corp Semiconductor device and manufacturing method.
JPH11251686A (ja) * 1998-03-05 1999-09-17 Mitsubishi Electric Corp 変調器付半導体レーザ及びその製造方法
EP1198042B1 (en) * 2000-10-12 2006-05-10 Fuji Photo Film Co., Ltd. Semiconductor laser device with a current non-injection region near a resonator end face, and fabrication method thereof

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60229389A (ja) * 1984-04-26 1985-11-14 Sharp Corp 半導体レ−ザ素子
JPS6113682A (ja) * 1984-06-28 1986-01-21 Nec Corp 半導体レ−ザの製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0649620U (ja) * 1992-04-28 1994-07-08 平尾鉄建株式会社 貫通孔を有する鉄筋コンクリート構造物の補強部材

Also Published As

Publication number Publication date
JPS6338279A (ja) 1988-02-18

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term