JPH05283614A - 集積回路のキャパシタ構造 - Google Patents
集積回路のキャパシタ構造Info
- Publication number
- JPH05283614A JPH05283614A JP4358954A JP35895492A JPH05283614A JP H05283614 A JPH05283614 A JP H05283614A JP 4358954 A JP4358954 A JP 4358954A JP 35895492 A JP35895492 A JP 35895492A JP H05283614 A JPH05283614 A JP H05283614A
- Authority
- JP
- Japan
- Prior art keywords
- conductive layer
- capacitor
- capacitor structure
- plate
- conductive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/201—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits
- H10D84/204—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits of combinations of diodes or capacitors or resistors
- H10D84/212—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits of combinations of diodes or capacitors or resistors of only capacitors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D1/00—Resistors, capacitors or inductors
- H10D1/60—Capacitors
- H10D1/68—Capacitors having no potential barriers
Landscapes
- Semiconductor Integrated Circuits (AREA)
- Filters That Use Time-Delay Elements (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US07/821034 | 1992-01-16 | ||
| US07/821,034 US5220483A (en) | 1992-01-16 | 1992-01-16 | Tri-level capacitor structure in switched-capacitor filter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05283614A true JPH05283614A (ja) | 1993-10-29 |
Family
ID=25232334
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4358954A Pending JPH05283614A (ja) | 1992-01-16 | 1992-12-25 | 集積回路のキャパシタ構造 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US5220483A (https=) |
| JP (1) | JPH05283614A (https=) |
| DE (1) | DE4300519C2 (https=) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6104053A (en) * | 1997-09-01 | 2000-08-15 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor device comprising capacitor in logic circuit area and method of fabricating the same |
| WO2003084085A1 (fr) * | 2002-03-28 | 2003-10-09 | Kabushiki Kaisha Toyota Jidoshokki | Appareil recepteur |
| US7030443B2 (en) | 2002-08-30 | 2006-04-18 | Matsushita Electric Industrial Co., Ltd. | MIM capacitor |
Families Citing this family (40)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SG48955A1 (en) * | 1992-07-27 | 1998-05-18 | Murata Manufacturing Co | Multilayer electronic component method of manufacturing the same and method of measuring characteristics thereof |
| US5635669A (en) * | 1992-07-27 | 1997-06-03 | Murata Manufacturing Co., Ltd. | Multilayer electronic component |
| US5926360A (en) * | 1996-12-11 | 1999-07-20 | International Business Machines Corporation | Metallized oxide structure and fabrication |
| US5837556A (en) * | 1997-01-06 | 1998-11-17 | Sundstrand Corporation | Method of removing a component from a substrate |
| US7336468B2 (en) | 1997-04-08 | 2008-02-26 | X2Y Attenuators, Llc | Arrangement for energy conditioning |
| US7321485B2 (en) | 1997-04-08 | 2008-01-22 | X2Y Attenuators, Llc | Arrangement for energy conditioning |
| US9054094B2 (en) | 1997-04-08 | 2015-06-09 | X2Y Attenuators, Llc | Energy conditioning circuit arrangement for integrated circuit |
| US6198153B1 (en) * | 1997-04-21 | 2001-03-06 | Lsi Logic Corporation | Capacitors with silicized polysilicon shielding in digital CMOS process |
| US6016114A (en) * | 1997-04-21 | 2000-01-18 | Lsi Logic Corporation | Apparatus and method of fabricating mixed signal interface in GSM wireless application |
| US6198123B1 (en) | 1997-08-29 | 2001-03-06 | Cardiac Pacemakers, Inc. | Shielded integrated circuit capacitor connected to a lateral transistor |
| US6542352B1 (en) * | 1997-12-09 | 2003-04-01 | Daniel Devoe | Ceramic chip capacitor of conventional volume and external form having increased capacitance from use of closely spaced interior conductive planes reliably connecting to positionally tolerant exterior pads through multiple redundant vias |
| US6366443B1 (en) * | 1997-12-09 | 2002-04-02 | Daniel Devoe | Ceramic chip capacitor of conventional volume and external form having increased capacitance from use of closely-spaced interior conductive planes reliably connecting to positionally-tolerant exterior pads through multiple redundant vias |
| US6066537A (en) * | 1998-02-02 | 2000-05-23 | Tritech Microelectronics, Ltd. | Method for fabricating a shielded multilevel integrated circuit capacitor |
| US6288661B1 (en) | 1999-10-15 | 2001-09-11 | Cygnal Integrated Products, Inc. | A/D converter with voltage/charge scaling |
| US6400300B1 (en) | 2000-05-31 | 2002-06-04 | Cygnal Integrated Products, Inc. | D/A converter street effect compensation |
| US6433717B1 (en) | 2000-05-31 | 2002-08-13 | Cygnal Integrated Products, Inc. | D/A resistor strings with cross coupling switches |
| US6448916B1 (en) | 2000-05-31 | 2002-09-10 | Cygnal Integrated Products, Inc. | Dual sub-DAC resistor strings with analog interpolation |
| US6384763B1 (en) | 2000-05-31 | 2002-05-07 | Cygnal Integrated Products, Inc. | Segemented D/A converter with enhanced dynamic range |
| US6448917B1 (en) | 2000-05-31 | 2002-09-10 | Cygnal Integrated Products, Inc. | DAC using current source driving main resistor string |
| US6452778B1 (en) | 2000-06-19 | 2002-09-17 | Cygnal Integrated Products, Inc. | Parasitic insensitive capacitor in d/a converter |
| US6456220B1 (en) | 2000-06-19 | 2002-09-24 | Cygnal Integrated Products, Inc. | Analog-to-digital converter for processing differential and single-ended inputs |
| GB2367428B (en) * | 2001-12-19 | 2002-10-09 | Zarlink Semiconductor Ltd | Integrated circuit |
| US6737698B1 (en) * | 2002-03-11 | 2004-05-18 | Silicon Laboratories, Inc. | Shielded capacitor structure |
| US6661639B1 (en) | 2002-07-02 | 2003-12-09 | Presidio Components, Inc. | Single layer capacitor |
| US6774459B2 (en) * | 2002-08-13 | 2004-08-10 | Micron Technology, Inc. | Capacitor layout technique for reduction of fixed pattern noise in a CMOS sensor |
| US6917509B1 (en) | 2002-11-21 | 2005-07-12 | Daniel F. Devoe | Single layer capacitor with dissimilar metallizations |
| US6940707B2 (en) * | 2003-07-03 | 2005-09-06 | Matsushita Electric Industrial Co., Ltd. | Differential capacitor, differential antenna element, and differential resonator |
| US7048153B2 (en) * | 2003-09-25 | 2006-05-23 | Unilever Home & Personal Care Usa, Division Of Conopco, Inc. | Foam dispensing article |
| US6885539B1 (en) | 2003-12-02 | 2005-04-26 | Presidio Components, Inc. | Single layer capacitor |
| US7259956B2 (en) * | 2003-12-19 | 2007-08-21 | Broadcom Corporation | Scalable integrated circuit high density capacitors |
| US6903918B1 (en) | 2004-04-20 | 2005-06-07 | Texas Instruments Incorporated | Shielded planar capacitor |
| DE102004038528A1 (de) * | 2004-08-07 | 2006-03-16 | Atmel Germany Gmbh | Halbleiterstruktur |
| JP2008537843A (ja) | 2005-03-01 | 2008-09-25 | エックストゥーワイ アテニュエイターズ,エルエルシー | 内部で重なり合った調整器 |
| TWI258865B (en) * | 2005-03-29 | 2006-07-21 | Realtek Semiconductor Corp | Longitudinal plate capacitor structure |
| JP4744924B2 (ja) * | 2005-05-10 | 2011-08-10 | 株式会社東芝 | Lsi内部信号観測回路 |
| US8169014B2 (en) * | 2006-01-09 | 2012-05-01 | Taiwan Semiconductor Manufacturing Co., Ltd. | Interdigitated capacitive structure for an integrated circuit |
| US20080149145A1 (en) * | 2006-12-22 | 2008-06-26 | Visichem Technology, Ltd | Method and apparatus for optical surface cleaning by liquid cleaner as foam |
| US8993501B2 (en) | 2011-08-01 | 2015-03-31 | Visichem Technology, Ltd. | Sprayable gel cleaner for optical and electronic surfaces |
| JP2014120615A (ja) | 2012-12-17 | 2014-06-30 | Fujitsu Semiconductor Ltd | 容量素子、容量アレイおよびa/d変換器 |
| US9054069B2 (en) * | 2013-09-05 | 2015-06-09 | International Business Machines Corporation | Variable capacitance integrated circuit |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5890755A (ja) * | 1981-11-25 | 1983-05-30 | Nec Corp | 半導体装置 |
| JPS6116561A (ja) * | 1984-07-03 | 1986-01-24 | Nec Corp | 半導体装置とその使用方法 |
| JPS6382117A (ja) * | 1986-09-26 | 1988-04-12 | Nec Corp | スイツチトキヤパシタ型フイルタ回路 |
| JPH0244353B2 (ja) * | 1983-09-14 | 1990-10-03 | Mitsubishi Heavy Ind Ltd | Sekinetsukookusukanshikishokasetsubinokanenseigasunoshorihoho |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4949154A (en) * | 1983-02-23 | 1990-08-14 | Texas Instruments, Incorporated | Thin dielectrics over polysilicon |
| JPS60211866A (ja) * | 1984-04-05 | 1985-10-24 | Mitsubishi Electric Corp | 半導体集積回路 |
| IT1186340B (it) * | 1985-10-29 | 1987-11-26 | Sgs Microelettronica Spa | Integratore differenziale a condensatore commutato utilizzante un unico condensatore di integrazione |
| US4849662A (en) * | 1986-04-14 | 1989-07-18 | Crystal Semiconductor Corporation | Switched-capacitor filter having digitally-programmable capacitive element |
| US4731696A (en) * | 1987-05-26 | 1988-03-15 | National Semiconductor Corporation | Three plate integrated circuit capacitor |
| KR920000077B1 (ko) * | 1987-07-28 | 1992-01-06 | 가부시키가이샤 도시바 | 반도체장치의 제조방법 |
| NL8703152A (nl) * | 1987-12-29 | 1989-07-17 | Philips Nv | Geschakeld kapaciteitsnetwerk. |
| US5032892A (en) * | 1988-05-31 | 1991-07-16 | Micron Technology, Inc. | Depletion mode chip decoupling capacitor |
| US5116776A (en) * | 1989-11-30 | 1992-05-26 | Sgs-Thomson Microelectronics, Inc. | Method of making a stacked copacitor for dram cell |
| US5036020A (en) * | 1990-08-31 | 1991-07-30 | Texas Instrument Incorporated | Method of fabricating microelectronic device incorporating capacitor having lowered topographical profile |
| US5093774A (en) * | 1991-03-22 | 1992-03-03 | Thomas & Betts Corporation | Two-terminal series-connected network |
-
1992
- 1992-01-16 US US07/821,034 patent/US5220483A/en not_active Expired - Lifetime
- 1992-12-25 JP JP4358954A patent/JPH05283614A/ja active Pending
-
1993
- 1993-01-12 DE DE4300519A patent/DE4300519C2/de not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5890755A (ja) * | 1981-11-25 | 1983-05-30 | Nec Corp | 半導体装置 |
| JPH0244353B2 (ja) * | 1983-09-14 | 1990-10-03 | Mitsubishi Heavy Ind Ltd | Sekinetsukookusukanshikishokasetsubinokanenseigasunoshorihoho |
| JPS6116561A (ja) * | 1984-07-03 | 1986-01-24 | Nec Corp | 半導体装置とその使用方法 |
| JPS6382117A (ja) * | 1986-09-26 | 1988-04-12 | Nec Corp | スイツチトキヤパシタ型フイルタ回路 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6104053A (en) * | 1997-09-01 | 2000-08-15 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor device comprising capacitor in logic circuit area and method of fabricating the same |
| WO2003084085A1 (fr) * | 2002-03-28 | 2003-10-09 | Kabushiki Kaisha Toyota Jidoshokki | Appareil recepteur |
| US7030443B2 (en) | 2002-08-30 | 2006-04-18 | Matsushita Electric Industrial Co., Ltd. | MIM capacitor |
Also Published As
| Publication number | Publication date |
|---|---|
| DE4300519A1 (https=) | 1993-07-22 |
| US5220483A (en) | 1993-06-15 |
| DE4300519C2 (de) | 1998-01-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 19960820 |