JPH0527754Y2 - - Google Patents
Info
- Publication number
- JPH0527754Y2 JPH0527754Y2 JP17876687U JP17876687U JPH0527754Y2 JP H0527754 Y2 JPH0527754 Y2 JP H0527754Y2 JP 17876687 U JP17876687 U JP 17876687U JP 17876687 U JP17876687 U JP 17876687U JP H0527754 Y2 JPH0527754 Y2 JP H0527754Y2
- Authority
- JP
- Japan
- Prior art keywords
- valve
- gas
- shaft
- valve body
- valve member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007789 sealing Methods 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 238000011109 contamination Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 230000014759 maintenance of location Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000005553 drilling Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
Landscapes
- Details Of Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17876687U JPH0527754Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-11-24 | 1987-11-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17876687U JPH0527754Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-11-24 | 1987-11-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0182384U JPH0182384U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-06-01 |
| JPH0527754Y2 true JPH0527754Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-07-15 |
Family
ID=31470368
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17876687U Expired - Lifetime JPH0527754Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-11-24 | 1987-11-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0527754Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7037955B2 (ja) * | 2018-02-21 | 2022-03-17 | 日立Astemo株式会社 | 減圧弁 |
-
1987
- 1987-11-24 JP JP17876687U patent/JPH0527754Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0182384U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-06-01 |