JPH0527080B2 - - Google Patents

Info

Publication number
JPH0527080B2
JPH0527080B2 JP59012477A JP1247784A JPH0527080B2 JP H0527080 B2 JPH0527080 B2 JP H0527080B2 JP 59012477 A JP59012477 A JP 59012477A JP 1247784 A JP1247784 A JP 1247784A JP H0527080 B2 JPH0527080 B2 JP H0527080B2
Authority
JP
Japan
Prior art keywords
soft
plane
rays
mirror
ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59012477A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60156000A (ja
Inventor
Hiroshi Yano
Koichiro Ootori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP1247784A priority Critical patent/JPS60156000A/ja
Publication of JPS60156000A publication Critical patent/JPS60156000A/ja
Publication of JPH0527080B2 publication Critical patent/JPH0527080B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
JP1247784A 1984-01-26 1984-01-26 軟ｘ線投射装置 Granted JPS60156000A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1247784A JPS60156000A (ja) 1984-01-26 1984-01-26 軟ｘ線投射装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1247784A JPS60156000A (ja) 1984-01-26 1984-01-26 軟ｘ線投射装置

Publications (2)

Publication Number Publication Date
JPS60156000A JPS60156000A (ja) 1985-08-16
JPH0527080B2 true JPH0527080B2 (OSRAM) 1993-04-20

Family

ID=11806460

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1247784A Granted JPS60156000A (ja) 1984-01-26 1984-01-26 軟ｘ線投射装置

Country Status (1)

Country Link
JP (1) JPS60156000A (OSRAM)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0827399B2 (ja) * 1988-03-25 1996-03-21 キヤノン株式会社 露光装置
JP2637546B2 (ja) * 1989-03-22 1997-08-06 キヤノン株式会社 Ｘ線露光装置
US5031199A (en) * 1990-06-05 1991-07-09 Wisconsin Alumni Research Foundation X-ray lithography beamline method and apparatus
US5371774A (en) * 1993-06-24 1994-12-06 Wisconsin Alumni Research Foundation X-ray lithography beamline imaging system

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3270459D1 (en) * 1981-12-31 1986-05-15 Ibm A method and apparatus for providing a uniform illumination of an area

Also Published As

Publication number Publication date
JPS60156000A (ja) 1985-08-16

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Legal Events

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EXPY Cancellation because of completion of term