JPH0524114B2 - - Google Patents
Info
- Publication number
- JPH0524114B2 JPH0524114B2 JP63087343A JP8734388A JPH0524114B2 JP H0524114 B2 JPH0524114 B2 JP H0524114B2 JP 63087343 A JP63087343 A JP 63087343A JP 8734388 A JP8734388 A JP 8734388A JP H0524114 B2 JPH0524114 B2 JP H0524114B2
- Authority
- JP
- Japan
- Prior art keywords
- diamond
- substrate
- synthesis
- khz
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8734388A JPH01261298A (ja) | 1988-04-11 | 1988-04-11 | ダイヤモンド合成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8734388A JPH01261298A (ja) | 1988-04-11 | 1988-04-11 | ダイヤモンド合成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01261298A JPH01261298A (ja) | 1989-10-18 |
| JPH0524114B2 true JPH0524114B2 (enrdf_load_stackoverflow) | 1993-04-06 |
Family
ID=13912223
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8734388A Granted JPH01261298A (ja) | 1988-04-11 | 1988-04-11 | ダイヤモンド合成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01261298A (enrdf_load_stackoverflow) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6287489A (ja) * | 1985-10-12 | 1987-04-21 | Sumitomo Electric Ind Ltd | るつぼの回収方法及び装置 |
| JPH01270596A (ja) * | 1988-04-18 | 1989-10-27 | Ngk Spark Plug Co Ltd | ダイヤモンド被膜の析出形成方法 |
| US5837332A (en) * | 1989-11-19 | 1998-11-17 | Nihon Victor Kabushiki-Kaisha | Method and apparatus for preparing crystal thin films by using a surface acoustic wave |
| JP2748982B2 (ja) * | 1989-11-19 | 1998-05-13 | 高橋 研 | 薄膜形成方法及び薄膜装置、素子、電子・磁気装置、情報記録再生装置並びに信号処理装置 |
| JPH03278463A (ja) * | 1990-03-27 | 1991-12-10 | Canon Inc | ショットキーダイオードの形成方法 |
| US6835523B1 (en) | 1993-05-09 | 2004-12-28 | Semiconductor Energy Laboratory Co., Ltd. | Apparatus for fabricating coating and method of fabricating the coating |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61163195A (ja) * | 1985-01-09 | 1986-07-23 | Showa Denko Kk | ダイヤモンド気相合成法及びその装置 |
| DE3546113A1 (de) * | 1985-12-24 | 1987-06-25 | Santrade Ltd | Verbundpulverteilchen, verbundkoerper und verfahren zu deren herstellung |
-
1988
- 1988-04-11 JP JP8734388A patent/JPH01261298A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01261298A (ja) | 1989-10-18 |
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