JPH01261298A - ダイヤモンド合成方法 - Google Patents
ダイヤモンド合成方法Info
- Publication number
- JPH01261298A JPH01261298A JP8734388A JP8734388A JPH01261298A JP H01261298 A JPH01261298 A JP H01261298A JP 8734388 A JP8734388 A JP 8734388A JP 8734388 A JP8734388 A JP 8734388A JP H01261298 A JPH01261298 A JP H01261298A
- Authority
- JP
- Japan
- Prior art keywords
- diamond
- raw material
- substrate
- base substance
- material gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8734388A JPH01261298A (ja) | 1988-04-11 | 1988-04-11 | ダイヤモンド合成方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8734388A JPH01261298A (ja) | 1988-04-11 | 1988-04-11 | ダイヤモンド合成方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01261298A true JPH01261298A (ja) | 1989-10-18 |
JPH0524114B2 JPH0524114B2 (enrdf_load_stackoverflow) | 1993-04-06 |
Family
ID=13912223
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8734388A Granted JPH01261298A (ja) | 1988-04-11 | 1988-04-11 | ダイヤモンド合成方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01261298A (enrdf_load_stackoverflow) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01270596A (ja) * | 1988-04-18 | 1989-10-27 | Ngk Spark Plug Co Ltd | ダイヤモンド被膜の析出形成方法 |
US4938837A (en) * | 1985-10-12 | 1990-07-03 | Sumitomo Electric Industries, Ltd. | Crucible recovering method and apparatus therefor |
WO1991007520A1 (en) * | 1989-11-19 | 1991-05-30 | Kabushiki-Kaisha Hitachi Seisakusho | Method and apparatus for thin film formation, device, electro-magnetic apparatus, data recording/reproduction apparatus, signal processor, and method of producing molten crystal |
US5219769A (en) * | 1990-03-27 | 1993-06-15 | Canon Kabushiki Kaisha | Method for forming Schottky diode |
US5837332A (en) * | 1989-11-19 | 1998-11-17 | Nihon Victor Kabushiki-Kaisha | Method and apparatus for preparing crystal thin films by using a surface acoustic wave |
US6835523B1 (en) | 1993-05-09 | 2004-12-28 | Semiconductor Energy Laboratory Co., Ltd. | Apparatus for fabricating coating and method of fabricating the coating |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61163195A (ja) * | 1985-01-09 | 1986-07-23 | Showa Denko Kk | ダイヤモンド気相合成法及びその装置 |
JPS62216906A (ja) * | 1985-12-24 | 1987-09-24 | 住友電気工業株式会社 | 複合粉末状粒子,製造方法および製造装置 |
-
1988
- 1988-04-11 JP JP8734388A patent/JPH01261298A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61163195A (ja) * | 1985-01-09 | 1986-07-23 | Showa Denko Kk | ダイヤモンド気相合成法及びその装置 |
JPS62216906A (ja) * | 1985-12-24 | 1987-09-24 | 住友電気工業株式会社 | 複合粉末状粒子,製造方法および製造装置 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4938837A (en) * | 1985-10-12 | 1990-07-03 | Sumitomo Electric Industries, Ltd. | Crucible recovering method and apparatus therefor |
JPH01270596A (ja) * | 1988-04-18 | 1989-10-27 | Ngk Spark Plug Co Ltd | ダイヤモンド被膜の析出形成方法 |
WO1991007520A1 (en) * | 1989-11-19 | 1991-05-30 | Kabushiki-Kaisha Hitachi Seisakusho | Method and apparatus for thin film formation, device, electro-magnetic apparatus, data recording/reproduction apparatus, signal processor, and method of producing molten crystal |
US5837332A (en) * | 1989-11-19 | 1998-11-17 | Nihon Victor Kabushiki-Kaisha | Method and apparatus for preparing crystal thin films by using a surface acoustic wave |
US5219769A (en) * | 1990-03-27 | 1993-06-15 | Canon Kabushiki Kaisha | Method for forming Schottky diode |
US6835523B1 (en) | 1993-05-09 | 2004-12-28 | Semiconductor Energy Laboratory Co., Ltd. | Apparatus for fabricating coating and method of fabricating the coating |
Also Published As
Publication number | Publication date |
---|---|
JPH0524114B2 (enrdf_load_stackoverflow) | 1993-04-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPH0346436B2 (enrdf_load_stackoverflow) | ||
KR960000063B1 (ko) | 응축 다이아몬드 | |
JPH01261298A (ja) | ダイヤモンド合成方法 | |
JPH0518796B2 (enrdf_load_stackoverflow) | ||
JPS60231494A (ja) | ダイヤモンド超微粉の製造法 | |
JPS6054996A (ja) | ダイヤモンドの合成法 | |
JPS62158195A (ja) | ダイヤモンドの合成法 | |
JP2962631B2 (ja) | ダイヤモンド状炭素薄膜の製造方法 | |
JPS5935092A (ja) | ダイヤモンドの気相合成法 | |
JP3176086B2 (ja) | ダイヤモンド結晶及びダイヤモンド形成用基体 | |
JPS5918197A (ja) | ダイヤモンドの気相合成法 | |
JP3028121B2 (ja) | ダイヤモンド薄膜の作成方法 | |
Toyota et al. | Synthesizing Cubic Diamond Crystal Using DC Plasma Jet CVD | |
JPH0643280B2 (ja) | 膜状ダイヤモンドの気相合成法 | |
JPH0656585A (ja) | ダイヤモンド膜の被覆方法 | |
JPH0665744A (ja) | ダイヤモンド状炭素薄膜の製造方法 | |
JP2977619B2 (ja) | ダイヤモンド膜形成方法 | |
JPS63256596A (ja) | ダイヤモンドの気相合成法 | |
JPS60200896A (ja) | 繊維状ダイヤモンドの合成法 | |
JPS593098A (ja) | ダイヤモンドの合成法 | |
JPH01317198A (ja) | ダイヤモンド等の合成方法 | |
JPS61128700A (ja) | スピ−カ−用振動板 | |
JPH03141199A (ja) | 単結晶cvdダイヤモンドの製造方法 | |
JPH035314A (ja) | ダイヤモンド粉未の合成方法 | |
JPH0532489A (ja) | プラズマを用いるダイヤモンドの合成法 |