JPH0518796B2 - - Google Patents

Info

Publication number
JPH0518796B2
JPH0518796B2 JP59033473A JP3347384A JPH0518796B2 JP H0518796 B2 JPH0518796 B2 JP H0518796B2 JP 59033473 A JP59033473 A JP 59033473A JP 3347384 A JP3347384 A JP 3347384A JP H0518796 B2 JPH0518796 B2 JP H0518796B2
Authority
JP
Japan
Prior art keywords
diamond
gas
substrate
graphite
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59033473A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60180999A (ja
Inventor
Nobuaki Shohata
Kazutaka Fujii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP59033473A priority Critical patent/JPS60180999A/ja
Publication of JPS60180999A publication Critical patent/JPS60180999A/ja
Publication of JPH0518796B2 publication Critical patent/JPH0518796B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/04—Diamond

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Carbon And Carbon Compounds (AREA)
JP59033473A 1984-02-24 1984-02-24 ダイヤモンドの合成方法 Granted JPS60180999A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59033473A JPS60180999A (ja) 1984-02-24 1984-02-24 ダイヤモンドの合成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59033473A JPS60180999A (ja) 1984-02-24 1984-02-24 ダイヤモンドの合成方法

Publications (2)

Publication Number Publication Date
JPS60180999A JPS60180999A (ja) 1985-09-14
JPH0518796B2 true JPH0518796B2 (enrdf_load_stackoverflow) 1993-03-12

Family

ID=12387511

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59033473A Granted JPS60180999A (ja) 1984-02-24 1984-02-24 ダイヤモンドの合成方法

Country Status (1)

Country Link
JP (1) JPS60180999A (enrdf_load_stackoverflow)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2635021B2 (ja) * 1985-09-26 1997-07-30 宣夫 御子柴 堆積膜形成法及びこれに用いる装置
US5512102A (en) * 1985-10-14 1996-04-30 Semiconductor Energy Laboratory Co., Ltd. Microwave enhanced CVD system under magnetic field
JPS6385011A (ja) * 1986-09-26 1988-04-15 Idemitsu Petrochem Co Ltd ダイヤモンドの製造方法
JPS63107898A (ja) * 1986-10-23 1988-05-12 Natl Inst For Res In Inorg Mater プラズマを用いるダイヤモンドの合成法
US4849199A (en) * 1987-03-30 1989-07-18 Crystallume Method for suppressing growth of graphite and other non-diamond carbon species during formation of synthetic diamond
US4981717A (en) * 1989-02-24 1991-01-01 Mcdonnell Douglas Corporation Diamond like coating and method of forming
JPH04182389A (ja) * 1990-11-13 1992-06-29 Japan Steel Works Ltd:The ダイヤモンドの合成方法
JPH04182388A (ja) * 1990-11-13 1992-06-29 Japan Steel Works Ltd:The ダイヤモンドの合成方法
CA2049673A1 (en) * 1990-11-26 1992-05-27 James F. Fleischer Cvd diamond by alternating chemical reactions
JPH04338197A (ja) * 1991-05-10 1992-11-25 Japan Steel Works Ltd:The ダイヤモンドの合成方法

Also Published As

Publication number Publication date
JPS60180999A (ja) 1985-09-14

Similar Documents

Publication Publication Date Title
US4434188A (en) Method for synthesizing diamond
JPS5891100A (ja) ダイヤモンドの合成法
JPS5927754B2 (ja) ダイヤモンドの合成法
JPH0518796B2 (enrdf_load_stackoverflow)
JPH0419198B2 (enrdf_load_stackoverflow)
JPS6221757B2 (enrdf_load_stackoverflow)
JPS6054996A (ja) ダイヤモンドの合成法
JPH01261298A (ja) ダイヤモンド合成方法
JPH04235282A (ja) 光ｃｖｄ法及び光ｃｖｄ装置
JPS5918197A (ja) ダイヤモンドの気相合成法
JPH0518798B2 (enrdf_load_stackoverflow)
JPS63117993A (ja) ダイヤモンドの気相合成法
JPH0448758B2 (enrdf_load_stackoverflow)
JPH0518799B2 (enrdf_load_stackoverflow)
JPS60200896A (ja) 繊維状ダイヤモンドの合成法
JPH0480000B2 (enrdf_load_stackoverflow)
JPS60145995A (ja) ダイヤモンド状カ−ボンの製造方法
JPS60112698A (ja) ダイヤモンドの製造方法
JPH0518797B2 (enrdf_load_stackoverflow)
JPH06280019A (ja) ダイヤモンド状炭素薄膜の製造方法
JPS593098A (ja) ダイヤモンドの合成法
JPS63297299A (ja) ダイヤモンドの気相合成法
JPH0341436B2 (enrdf_load_stackoverflow)
JPS61201694A (ja) ダイヤモンドの気相合成法
JPH04139014A (ja) 炭化珪素の製造方法