JPH0448758B2 - - Google Patents

Info

Publication number
JPH0448758B2
JPH0448758B2 JP58236737A JP23673783A JPH0448758B2 JP H0448758 B2 JPH0448758 B2 JP H0448758B2 JP 58236737 A JP58236737 A JP 58236737A JP 23673783 A JP23673783 A JP 23673783A JP H0448758 B2 JPH0448758 B2 JP H0448758B2
Authority
JP
Japan
Prior art keywords
diamond
substrate
gas
reaction
hydrocarbons
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58236737A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60127300A (ja
Inventor
Kazutaka Fujii
Nobuaki Shohata
Masao Mikami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP58236737A priority Critical patent/JPS60127300A/ja
Publication of JPS60127300A publication Critical patent/JPS60127300A/ja
Publication of JPH0448758B2 publication Critical patent/JPH0448758B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/04—Diamond

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP58236737A 1983-12-15 1983-12-15 ダイヤモンドの気相合成方法 Granted JPS60127300A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58236737A JPS60127300A (ja) 1983-12-15 1983-12-15 ダイヤモンドの気相合成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58236737A JPS60127300A (ja) 1983-12-15 1983-12-15 ダイヤモンドの気相合成方法

Publications (2)

Publication Number Publication Date
JPS60127300A JPS60127300A (ja) 1985-07-06
JPH0448758B2 true JPH0448758B2 (enrdf_load_stackoverflow) 1992-08-07

Family

ID=17005034

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58236737A Granted JPS60127300A (ja) 1983-12-15 1983-12-15 ダイヤモンドの気相合成方法

Country Status (1)

Country Link
JP (1) JPS60127300A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60171295A (ja) * 1984-02-14 1985-09-04 Mitsubishi Metal Corp 人工ダイヤモンドを蒸着生成する方法
JPS62278196A (ja) * 1986-05-27 1987-12-03 Yoichi Hirose ダイヤモンド合成方法
US4863529A (en) * 1987-03-12 1989-09-05 Sumitomo Electric Industries, Ltd. Thin film single crystal diamond substrate

Also Published As

Publication number Publication date
JPS60127300A (ja) 1985-07-06

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