JPH0520915B2 - - Google Patents
Info
- Publication number
- JPH0520915B2 JPH0520915B2 JP63021684A JP2168488A JPH0520915B2 JP H0520915 B2 JPH0520915 B2 JP H0520915B2 JP 63021684 A JP63021684 A JP 63021684A JP 2168488 A JP2168488 A JP 2168488A JP H0520915 B2 JPH0520915 B2 JP H0520915B2
- Authority
- JP
- Japan
- Prior art keywords
- ceramic
- ceramic substrate
- green sheet
- cavity
- laminate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Laminated Bodies (AREA)
- Devices For Post-Treatments, Processing, Supply, Discharge, And Other Processes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63021684A JPH01196191A (ja) | 1988-02-01 | 1988-02-01 | セラミクス基板の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63021684A JPH01196191A (ja) | 1988-02-01 | 1988-02-01 | セラミクス基板の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01196191A JPH01196191A (ja) | 1989-08-07 |
| JPH0520915B2 true JPH0520915B2 (enExample) | 1993-03-22 |
Family
ID=12061893
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63021684A Granted JPH01196191A (ja) | 1988-02-01 | 1988-02-01 | セラミクス基板の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01196191A (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101327307B1 (ko) * | 2006-11-27 | 2013-11-11 | 주식회사 미코 | 다층 기판 제조 방법 및 이를 이용한 정전척 제조 방법 |
| US8974891B2 (en) | 2007-10-26 | 2015-03-10 | Coi Ceramics, Inc. | Thermal protection systems comprising flexible regions of inter-bonded lamina of ceramic matrix composite material and methods of forming the same |
| JP5333308B2 (ja) * | 2009-05-11 | 2013-11-06 | 株式会社デンソー | セラミック積層体の製造方法 |
-
1988
- 1988-02-01 JP JP63021684A patent/JPH01196191A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01196191A (ja) | 1989-08-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |