JPH01196191A - セラミクス基板の製造方法 - Google Patents

セラミクス基板の製造方法

Info

Publication number
JPH01196191A
JPH01196191A JP63021684A JP2168488A JPH01196191A JP H01196191 A JPH01196191 A JP H01196191A JP 63021684 A JP63021684 A JP 63021684A JP 2168488 A JP2168488 A JP 2168488A JP H01196191 A JPH01196191 A JP H01196191A
Authority
JP
Japan
Prior art keywords
ceramic
green sheet
cavity
ceramic substrate
ceramic green
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63021684A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0520915B2 (enExample
Inventor
Wakichi Tsukamoto
塚本　和吉
Yasunobu Yoneda
康信 米田
Yukio Sakabe
行雄 坂部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP63021684A priority Critical patent/JPH01196191A/ja
Publication of JPH01196191A publication Critical patent/JPH01196191A/ja
Publication of JPH0520915B2 publication Critical patent/JPH0520915B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Laminated Bodies (AREA)
  • Devices For Post-Treatments, Processing, Supply, Discharge, And Other Processes (AREA)
JP63021684A 1988-02-01 1988-02-01 セラミクス基板の製造方法 Granted JPH01196191A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63021684A JPH01196191A (ja) 1988-02-01 1988-02-01 セラミクス基板の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63021684A JPH01196191A (ja) 1988-02-01 1988-02-01 セラミクス基板の製造方法

Publications (2)

Publication Number Publication Date
JPH01196191A true JPH01196191A (ja) 1989-08-07
JPH0520915B2 JPH0520915B2 (enExample) 1993-03-22

Family

ID=12061893

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63021684A Granted JPH01196191A (ja) 1988-02-01 1988-02-01 セラミクス基板の製造方法

Country Status (1)

Country Link
JP (1) JPH01196191A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010286473A (ja) * 2009-05-11 2010-12-24 Denso Corp セラミック積層体の製造方法
KR101327307B1 (ko) * 2006-11-27 2013-11-11 주식회사 미코 다층 기판 제조 방법 및 이를 이용한 정전척 제조 방법
US10967621B2 (en) 2007-10-26 2021-04-06 Coi Ceramics, Inc. Methods for forming ceramic matrix composite structures

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101327307B1 (ko) * 2006-11-27 2013-11-11 주식회사 미코 다층 기판 제조 방법 및 이를 이용한 정전척 제조 방법
US10967621B2 (en) 2007-10-26 2021-04-06 Coi Ceramics, Inc. Methods for forming ceramic matrix composite structures
JP2010286473A (ja) * 2009-05-11 2010-12-24 Denso Corp セラミック積層体の製造方法

Also Published As

Publication number Publication date
JPH0520915B2 (enExample) 1993-03-22

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