JPH0518264B2 - - Google Patents

Info

Publication number
JPH0518264B2
JPH0518264B2 JP58246505A JP24650583A JPH0518264B2 JP H0518264 B2 JPH0518264 B2 JP H0518264B2 JP 58246505 A JP58246505 A JP 58246505A JP 24650583 A JP24650583 A JP 24650583A JP H0518264 B2 JPH0518264 B2 JP H0518264B2
Authority
JP
Japan
Prior art keywords
circuit
manufacturing
resistance
wiring
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58246505A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60142537A (ja
Inventor
Jusuke Mizuguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP58246505A priority Critical patent/JPS60142537A/ja
Publication of JPS60142537A publication Critical patent/JPS60142537A/ja
Publication of JPH0518264B2 publication Critical patent/JPH0518264B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
JP58246505A 1983-12-29 1983-12-29 集積回路装置の製造方法 Granted JPS60142537A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58246505A JPS60142537A (ja) 1983-12-29 1983-12-29 集積回路装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58246505A JPS60142537A (ja) 1983-12-29 1983-12-29 集積回路装置の製造方法

Publications (2)

Publication Number Publication Date
JPS60142537A JPS60142537A (ja) 1985-07-27
JPH0518264B2 true JPH0518264B2 (enExample) 1993-03-11

Family

ID=17149393

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58246505A Granted JPS60142537A (ja) 1983-12-29 1983-12-29 集積回路装置の製造方法

Country Status (1)

Country Link
JP (1) JPS60142537A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05267582A (ja) * 1992-03-17 1993-10-15 Nec Yamagata Ltd 半導体ウェーハおよび半導体装置の製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4006492A (en) * 1975-06-23 1977-02-01 International Business Machines Corporation High density semiconductor chip organization
FR2495834A1 (fr) * 1980-12-05 1982-06-11 Cii Honeywell Bull Dispositif a circuits integres de haute densite

Also Published As

Publication number Publication date
JPS60142537A (ja) 1985-07-27

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