JPH0517713B2 - - Google Patents

Info

Publication number
JPH0517713B2
JPH0517713B2 JP55160465A JP16046580A JPH0517713B2 JP H0517713 B2 JPH0517713 B2 JP H0517713B2 JP 55160465 A JP55160465 A JP 55160465A JP 16046580 A JP16046580 A JP 16046580A JP H0517713 B2 JPH0517713 B2 JP H0517713B2
Authority
JP
Japan
Prior art keywords
layer
channel
forming
semiconductor substrate
channel layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP55160465A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5784178A (en
Inventor
Yoshasu Sugano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP55160465A priority Critical patent/JPS5784178A/ja
Publication of JPS5784178A publication Critical patent/JPS5784178A/ja
Publication of JPH0517713B2 publication Critical patent/JPH0517713B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/64—Double-diffused metal-oxide semiconductor [DMOS] FETs
    • H10D30/65—Lateral DMOS [LDMOS] FETs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/64—Double-diffused metal-oxide semiconductor [DMOS] FETs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/64—Double-diffused metal-oxide semiconductor [DMOS] FETs
    • H10D30/66—Vertical DMOS [VDMOS] FETs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/17—Semiconductor regions connected to electrodes not carrying current to be rectified, amplified or switched, e.g. channel regions
    • H10D62/393—Body regions of DMOS transistors or IGBTs 
JP55160465A 1980-11-14 1980-11-14 Field-effect transistor Granted JPS5784178A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55160465A JPS5784178A (en) 1980-11-14 1980-11-14 Field-effect transistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55160465A JPS5784178A (en) 1980-11-14 1980-11-14 Field-effect transistor

Publications (2)

Publication Number Publication Date
JPS5784178A JPS5784178A (en) 1982-05-26
JPH0517713B2 true JPH0517713B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-03-09

Family

ID=15715525

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55160465A Granted JPS5784178A (en) 1980-11-14 1980-11-14 Field-effect transistor

Country Status (1)

Country Link
JP (1) JPS5784178A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62282465A (ja) * 1986-03-05 1987-12-08 イクシス・コーポレーション モノリシツク半導体デバイスおよびその製造方法
JPS6381846A (ja) * 1986-09-25 1988-04-12 Fuji Electric Co Ltd 半導体装置の製造方法
JPH0320453U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1989-07-11 1991-02-28

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS528152B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-08-10 1977-03-07
JPS52132684A (en) * 1976-04-29 1977-11-07 Sony Corp Insulating gate type field effect transistor

Also Published As

Publication number Publication date
JPS5784178A (en) 1982-05-26

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