JPH0515075B2 - - Google Patents
Info
- Publication number
- JPH0515075B2 JPH0515075B2 JP61012997A JP1299786A JPH0515075B2 JP H0515075 B2 JPH0515075 B2 JP H0515075B2 JP 61012997 A JP61012997 A JP 61012997A JP 1299786 A JP1299786 A JP 1299786A JP H0515075 B2 JPH0515075 B2 JP H0515075B2
- Authority
- JP
- Japan
- Prior art keywords
- superconducting
- insulating
- layer
- insulating layer
- resistive element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 claims description 22
- 238000004519 manufacturing process Methods 0.000 claims description 16
- 238000000151 deposition Methods 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 35
- 230000001681 protective effect Effects 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000005291 magnetic effect Effects 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 239000002887 superconductor Substances 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Landscapes
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61012997A JPS62172771A (ja) | 1986-01-25 | 1986-01-25 | 超伝導回路装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61012997A JPS62172771A (ja) | 1986-01-25 | 1986-01-25 | 超伝導回路装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62172771A JPS62172771A (ja) | 1987-07-29 |
| JPH0515075B2 true JPH0515075B2 (zh) | 1993-02-26 |
Family
ID=11820843
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61012997A Granted JPS62172771A (ja) | 1986-01-25 | 1986-01-25 | 超伝導回路装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62172771A (zh) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60177689A (ja) * | 1984-02-23 | 1985-09-11 | Nec Corp | 超伝導回路装置 |
-
1986
- 1986-01-25 JP JP61012997A patent/JPS62172771A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60177689A (ja) * | 1984-02-23 | 1985-09-11 | Nec Corp | 超伝導回路装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62172771A (ja) | 1987-07-29 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |