JPH0513394B2 - - Google Patents

Info

Publication number
JPH0513394B2
JPH0513394B2 JP60255092A JP25509285A JPH0513394B2 JP H0513394 B2 JPH0513394 B2 JP H0513394B2 JP 60255092 A JP60255092 A JP 60255092A JP 25509285 A JP25509285 A JP 25509285A JP H0513394 B2 JPH0513394 B2 JP H0513394B2
Authority
JP
Japan
Prior art keywords
josephson
substrate
electrode
pattern
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60255092A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62115882A (ja
Inventor
Takeshi Imamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP60255092A priority Critical patent/JPS62115882A/ja
Publication of JPS62115882A publication Critical patent/JPS62115882A/ja
Publication of JPH0513394B2 publication Critical patent/JPH0513394B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0912—Manufacture or treatment of Josephson-effect devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
JP60255092A 1985-11-15 1985-11-15 ジヨセフソン接合素子の製造方法 Granted JPS62115882A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60255092A JPS62115882A (ja) 1985-11-15 1985-11-15 ジヨセフソン接合素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60255092A JPS62115882A (ja) 1985-11-15 1985-11-15 ジヨセフソン接合素子の製造方法

Publications (2)

Publication Number Publication Date
JPS62115882A JPS62115882A (ja) 1987-05-27
JPH0513394B2 true JPH0513394B2 (enrdf_load_stackoverflow) 1993-02-22

Family

ID=17274007

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60255092A Granted JPS62115882A (ja) 1985-11-15 1985-11-15 ジヨセフソン接合素子の製造方法

Country Status (1)

Country Link
JP (1) JPS62115882A (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52113679A (en) * 1976-03-19 1977-09-22 Toshiba Corp Sputter etching method

Also Published As

Publication number Publication date
JPS62115882A (ja) 1987-05-27

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term