JPH0513306B2 - - Google Patents

Info

Publication number
JPH0513306B2
JPH0513306B2 JP58209828A JP20982883A JPH0513306B2 JP H0513306 B2 JPH0513306 B2 JP H0513306B2 JP 58209828 A JP58209828 A JP 58209828A JP 20982883 A JP20982883 A JP 20982883A JP H0513306 B2 JPH0513306 B2 JP H0513306B2
Authority
JP
Japan
Prior art keywords
group
reaction
polymer
atom
weight
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58209828A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60102628A (ja
Inventor
Yoichi Kamoshita
Mitsunobu Koshiba
Yoshuki Harita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JSR Corp
Original Assignee
Japan Synthetic Rubber Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Synthetic Rubber Co Ltd filed Critical Japan Synthetic Rubber Co Ltd
Priority to JP20982883A priority Critical patent/JPS60102628A/ja
Publication of JPS60102628A publication Critical patent/JPS60102628A/ja
Publication of JPH0513306B2 publication Critical patent/JPH0513306B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
JP20982883A 1983-11-10 1983-11-10 Ｘ線レジスト Granted JPS60102628A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20982883A JPS60102628A (ja) 1983-11-10 1983-11-10 Ｘ線レジスト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20982883A JPS60102628A (ja) 1983-11-10 1983-11-10 Ｘ線レジスト

Publications (2)

Publication Number Publication Date
JPS60102628A JPS60102628A (ja) 1985-06-06
JPH0513306B2 true JPH0513306B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-02-22

Family

ID=16579286

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20982883A Granted JPS60102628A (ja) 1983-11-10 1983-11-10 Ｘ線レジスト

Country Status (1)

Country Link
JP (1) JPS60102628A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4208211A (en) * 1978-05-23 1980-06-17 Bell Telephone Laboratories, Incorporated Fabrication based on radiation sensitive resists and related products
JPS5511217A (en) * 1978-07-10 1980-01-26 Nippon Telegr & Teleph Corp <Ntt> Pattern forming method using radiation sensitive high polymer
FR2442625A1 (fr) * 1978-08-24 1980-06-27 Micro Mega Sa Melangeur air-eau pour le pulverisateur d'une piece a main dentaire
JPS5788729A (en) * 1980-11-21 1982-06-02 Nippon Telegr & Teleph Corp <Ntt> Forming method for minute pattern

Also Published As

Publication number Publication date
JPS60102628A (ja) 1985-06-06

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