JPH0511991Y2 - - Google Patents
Info
- Publication number
- JPH0511991Y2 JPH0511991Y2 JP1987061120U JP6112087U JPH0511991Y2 JP H0511991 Y2 JPH0511991 Y2 JP H0511991Y2 JP 1987061120 U JP1987061120 U JP 1987061120U JP 6112087 U JP6112087 U JP 6112087U JP H0511991 Y2 JPH0511991 Y2 JP H0511991Y2
- Authority
- JP
- Japan
- Prior art keywords
- chuck
- vacuum
- vacuum chuck
- adsorbed
- grooves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 235000012431 wafers Nutrition 0.000 description 7
- 239000000428 dust Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000011109 contamination Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Landscapes
- Automatic Assembly (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987061120U JPH0511991Y2 (ru) | 1987-04-22 | 1987-04-22 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987061120U JPH0511991Y2 (ru) | 1987-04-22 | 1987-04-22 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63169286U JPS63169286U (ru) | 1988-11-04 |
JPH0511991Y2 true JPH0511991Y2 (ru) | 1993-03-25 |
Family
ID=30894162
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987061120U Expired - Lifetime JPH0511991Y2 (ru) | 1987-04-22 | 1987-04-22 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0511991Y2 (ru) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6305272B2 (ja) * | 2014-08-14 | 2018-04-04 | 株式会社ディスコ | 搬送装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5718991B2 (ru) * | 1978-09-06 | 1982-04-20 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5338291Y2 (ru) * | 1973-08-14 | 1978-09-16 | ||
JPS5718991U (ru) * | 1980-07-02 | 1982-01-30 |
-
1987
- 1987-04-22 JP JP1987061120U patent/JPH0511991Y2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5718991B2 (ru) * | 1978-09-06 | 1982-04-20 |
Also Published As
Publication number | Publication date |
---|---|
JPS63169286U (ru) | 1988-11-04 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS6457637A (en) | Method and apparatus for handling wafer | |
JPH024144B2 (ru) | ||
US4946266A (en) | Universal object holder for microscopes | |
JP6568986B1 (ja) | アライメント装置、半導体ウエハ処理装置、およびアライメント方法 | |
JPH0511991Y2 (ru) | ||
JPH06326174A (ja) | ウェハ真空吸着装置 | |
JPS62221130A (ja) | 真空チヤツク装置 | |
JP2613035B2 (ja) | 基板吸着固定装置 | |
JPH03270048A (ja) | 真空チャック | |
JPH0831514B2 (ja) | 基板の吸着装置 | |
JPH081464A (ja) | ユニバーサルチャック機構の自動切換装置 | |
JP3164629B2 (ja) | 半導体ウエハ用真空チャックステージ | |
JPH0469129A (ja) | 円板のセンタリング装置 | |
JPH0742138U (ja) | 物体吸着装置 | |
JPH05326Y2 (ru) | ||
JPH0325917A (ja) | 半導体製造装置 | |
JPH04326508A (ja) | 真空吸着固定台およびそれを用いた露光装置 | |
JPH0450300Y2 (ru) | ||
KR19990035698U (ko) | 반도체 웨이퍼의 진공척구조 | |
JPS5823495Y2 (ja) | プロジエクシヨン溶接における被溶接物吸引用電極 | |
JPH03150863A (ja) | ウエハチャック | |
JPH05109791A (ja) | ペレツトボンダおよびペレツト吸着部交換装置 | |
JPS5848914A (ja) | ウエハピンセツト | |
JPH0424943A (ja) | ウエハチャック | |
JPH0566021B2 (ru) |