JPH0480549B2 - - Google Patents

Info

Publication number
JPH0480549B2
JPH0480549B2 JP57189050A JP18905082A JPH0480549B2 JP H0480549 B2 JPH0480549 B2 JP H0480549B2 JP 57189050 A JP57189050 A JP 57189050A JP 18905082 A JP18905082 A JP 18905082A JP H0480549 B2 JPH0480549 B2 JP H0480549B2
Authority
JP
Japan
Prior art keywords
resistor
integrated circuit
film
etching
superconducting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57189050A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5979584A (ja
Inventor
Juichi Nishino
Yoshinobu Taruya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP57189050A priority Critical patent/JPS5979584A/ja
Publication of JPS5979584A publication Critical patent/JPS5979584A/ja
Publication of JPH0480549B2 publication Critical patent/JPH0480549B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
JP57189050A 1982-10-29 1982-10-29 ジヨセフソン集積回路用抵抗 Granted JPS5979584A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57189050A JPS5979584A (ja) 1982-10-29 1982-10-29 ジヨセフソン集積回路用抵抗

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57189050A JPS5979584A (ja) 1982-10-29 1982-10-29 ジヨセフソン集積回路用抵抗

Publications (2)

Publication Number Publication Date
JPS5979584A JPS5979584A (ja) 1984-05-08
JPH0480549B2 true JPH0480549B2 (enExample) 1992-12-18

Family

ID=16234447

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57189050A Granted JPS5979584A (ja) 1982-10-29 1982-10-29 ジヨセフソン集積回路用抵抗

Country Status (1)

Country Link
JP (1) JPS5979584A (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6265487A (ja) * 1985-09-18 1987-03-24 Agency Of Ind Science & Technol 低温回路用抵抗およびその製造方法
JPH0620110B2 (ja) * 1985-10-07 1994-03-16 日本電気株式会社 半導体装置
JPS63234575A (ja) * 1987-03-24 1988-09-29 Agency Of Ind Science & Technol 超電導回路のパタ−ン形成方法
US5236857A (en) * 1991-10-30 1993-08-17 Texas Instruments Incorporated Resistor structure and process
JP4848202B2 (ja) * 2006-04-14 2011-12-28 三菱重工業株式会社 スクロール圧縮機

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54116894A (en) * 1978-03-03 1979-09-11 Nippon Telegr & Teleph Corp <Ntt> Superconduction circuit device
US4430662A (en) * 1981-04-09 1984-02-07 Sperry Corporation Superconductive tunnel junction integrated circuit

Also Published As

Publication number Publication date
JPS5979584A (ja) 1984-05-08

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