JPH046882B2 - - Google Patents

Info

Publication number
JPH046882B2
JPH046882B2 JP57103849A JP10384982A JPH046882B2 JP H046882 B2 JPH046882 B2 JP H046882B2 JP 57103849 A JP57103849 A JP 57103849A JP 10384982 A JP10384982 A JP 10384982A JP H046882 B2 JPH046882 B2 JP H046882B2
Authority
JP
Japan
Prior art keywords
light
interference fringes
measured
separated
wavelength
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57103849A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58221104A (ja
Inventor
Yoshitada Oshida
Tetsuya Kamioka
Tsutomu Kuze
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10384982A priority Critical patent/JPS58221104A/ja
Publication of JPS58221104A publication Critical patent/JPS58221104A/ja
Publication of JPH046882B2 publication Critical patent/JPH046882B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP10384982A 1982-06-18 1982-06-18 表面形状測定方法および装置 Granted JPS58221104A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10384982A JPS58221104A (ja) 1982-06-18 1982-06-18 表面形状測定方法および装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10384982A JPS58221104A (ja) 1982-06-18 1982-06-18 表面形状測定方法および装置

Publications (2)

Publication Number Publication Date
JPS58221104A JPS58221104A (ja) 1983-12-22
JPH046882B2 true JPH046882B2 (enrdf_load_stackoverflow) 1992-02-07

Family

ID=14364881

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10384982A Granted JPS58221104A (ja) 1982-06-18 1982-06-18 表面形状測定方法および装置

Country Status (1)

Country Link
JP (1) JPS58221104A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62135708A (ja) * 1985-12-10 1987-06-18 Yokogawa Electric Corp ３次元形状測定装置
JPS62204106A (ja) * 1986-03-05 1987-09-08 Yokogawa Electric Corp ３次元形状測定装置
JPS6325503A (ja) * 1986-07-17 1988-02-03 Ee D S:Kk 表面粗さ計
JPS6325502A (ja) * 1986-07-17 1988-02-03 Ee D S:Kk 表面粗さ計
GB2242976A (en) * 1990-04-12 1991-10-16 Rank Taylor Hobson Ltd Measuring surface characteristics

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5533001B2 (enrdf_load_stackoverflow) * 1972-09-20 1980-08-28
JPS56128407A (en) * 1980-03-07 1981-10-07 Hitachi Ltd Light interference device

Also Published As

Publication number Publication date
JPS58221104A (ja) 1983-12-22

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