JPS5533001B2 - - Google Patents

Info

Publication number
JPS5533001B2
JPS5533001B2 JP9497772A JP9497772A JPS5533001B2 JP S5533001 B2 JPS5533001 B2 JP S5533001B2 JP 9497772 A JP9497772 A JP 9497772A JP 9497772 A JP9497772 A JP 9497772A JP S5533001 B2 JPS5533001 B2 JP S5533001B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9497772A
Other languages
Japanese (ja)
Other versions
JPS4953067A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9497772A priority Critical patent/JPS5533001B2/ja
Publication of JPS4953067A publication Critical patent/JPS4953067A/ja
Publication of JPS5533001B2 publication Critical patent/JPS5533001B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP9497772A 1972-09-20 1972-09-20 Expired JPS5533001B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9497772A JPS5533001B2 (enrdf_load_stackoverflow) 1972-09-20 1972-09-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9497772A JPS5533001B2 (enrdf_load_stackoverflow) 1972-09-20 1972-09-20

Publications (2)

Publication Number Publication Date
JPS4953067A JPS4953067A (enrdf_load_stackoverflow) 1974-05-23
JPS5533001B2 true JPS5533001B2 (enrdf_load_stackoverflow) 1980-08-28

Family

ID=14124953

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9497772A Expired JPS5533001B2 (enrdf_load_stackoverflow) 1972-09-20 1972-09-20

Country Status (1)

Country Link
JP (1) JPS5533001B2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2622787C2 (de) * 1976-05-21 1978-05-18 Ibm Deutschland Gmbh, 7000 Stuttgart Verfahren zur interferometrischen Abstands-, Dicken- oder Ebenheitsmessung
DE3001881A1 (de) * 1980-01-19 1981-08-06 Basf Ag Verfahren und vorrichtungen zur oberflaechenanalyse von flexiblen materialien
JPS58221104A (ja) * 1982-06-18 1983-12-22 Hitachi Ltd 表面形状測定方法および装置

Also Published As

Publication number Publication date
JPS4953067A (enrdf_load_stackoverflow) 1974-05-23

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