JPH0462315B2 - - Google Patents

Info

Publication number
JPH0462315B2
JPH0462315B2 JP17608085A JP17608085A JPH0462315B2 JP H0462315 B2 JPH0462315 B2 JP H0462315B2 JP 17608085 A JP17608085 A JP 17608085A JP 17608085 A JP17608085 A JP 17608085A JP H0462315 B2 JPH0462315 B2 JP H0462315B2
Authority
JP
Japan
Prior art keywords
dioxathian
formula
oxide
alkyl group
alkyl
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP17608085A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6236373A (ja
Inventor
Osamu Kawabata
Fumio Tanimoto
Yoshiharu Inoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Neos Co Ltd
Original Assignee
Neos Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Neos Co Ltd filed Critical Neos Co Ltd
Priority to JP17608085A priority Critical patent/JPS6236373A/ja
Publication of JPS6236373A publication Critical patent/JPS6236373A/ja
Publication of JPH0462315B2 publication Critical patent/JPH0462315B2/ja
Granted legal-status Critical Current

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Landscapes

  • Heterocyclic Carbon Compounds Containing A Hetero Ring Having Oxygen Or Sulfur (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
JP17608085A 1985-08-09 1985-08-09 置換１，３，２−ジオキサチアン−２−オキシド誘導体およびその製法 Granted JPS6236373A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17608085A JPS6236373A (ja) 1985-08-09 1985-08-09 置換１，３，２−ジオキサチアン−２−オキシド誘導体およびその製法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17608085A JPS6236373A (ja) 1985-08-09 1985-08-09 置換１，３，２−ジオキサチアン−２−オキシド誘導体およびその製法

Publications (2)

Publication Number Publication Date
JPS6236373A JPS6236373A (ja) 1987-02-17
JPH0462315B2 true JPH0462315B2 (enExample) 1992-10-05

Family

ID=16007368

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17608085A Granted JPS6236373A (ja) 1985-08-09 1985-08-09 置換１，３，２−ジオキサチアン−２−オキシド誘導体およびその製法

Country Status (1)

Country Link
JP (1) JPS6236373A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6695155B2 (ja) * 2015-02-04 2020-05-20 住友化学株式会社 樹脂、レジスト組成物及びレジストパターンの製造方法

Also Published As

Publication number Publication date
JPS6236373A (ja) 1987-02-17

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