JPH0462314B2 - - Google Patents

Info

Publication number
JPH0462314B2
JPH0462314B2 JP17607985A JP17607985A JPH0462314B2 JP H0462314 B2 JPH0462314 B2 JP H0462314B2 JP 17607985 A JP17607985 A JP 17607985A JP 17607985 A JP17607985 A JP 17607985A JP H0462314 B2 JPH0462314 B2 JP H0462314B2
Authority
JP
Japan
Prior art keywords
dioxathiolane
oxide
mol
formula
alkoxymethyl
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP17607985A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6236372A (ja
Inventor
Osamu Kawabata
Fumio Tanimoto
Yoshiharu Inoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Neos Co Ltd
Original Assignee
Neos Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Neos Co Ltd filed Critical Neos Co Ltd
Priority to JP17607985A priority Critical patent/JPS6236372A/ja
Publication of JPS6236372A publication Critical patent/JPS6236372A/ja
Publication of JPH0462314B2 publication Critical patent/JPH0462314B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Heterocyclic Compounds Containing Sulfur Atoms (AREA)
JP17607985A 1985-08-09 1985-08-09 置換１，３，２−ジオキサチオラン−２−オキシド誘導体およびその製法 Granted JPS6236372A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17607985A JPS6236372A (ja) 1985-08-09 1985-08-09 置換１，３，２−ジオキサチオラン−２−オキシド誘導体およびその製法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17607985A JPS6236372A (ja) 1985-08-09 1985-08-09 置換１，３，２−ジオキサチオラン−２−オキシド誘導体およびその製法

Publications (2)

Publication Number Publication Date
JPS6236372A JPS6236372A (ja) 1987-02-17
JPH0462314B2 true JPH0462314B2 (enExample) 1992-10-05

Family

ID=16007350

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17607985A Granted JPS6236372A (ja) 1985-08-09 1985-08-09 置換１，３，２−ジオキサチオラン−２−オキシド誘導体およびその製法

Country Status (1)

Country Link
JP (1) JPS6236372A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6695155B2 (ja) * 2015-02-04 2020-05-20 住友化学株式会社 樹脂、レジスト組成物及びレジストパターンの製造方法

Also Published As

Publication number Publication date
JPS6236372A (ja) 1987-02-17

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