JPH0456975B2 - - Google Patents

Info

Publication number
JPH0456975B2
JPH0456975B2 JP60121918A JP12191885A JPH0456975B2 JP H0456975 B2 JPH0456975 B2 JP H0456975B2 JP 60121918 A JP60121918 A JP 60121918A JP 12191885 A JP12191885 A JP 12191885A JP H0456975 B2 JPH0456975 B2 JP H0456975B2
Authority
JP
Japan
Prior art keywords
photosensitive
heat
group
resistant material
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60121918A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61279852A (ja
Inventor
Hiroshi Adachi
Etsushi Adachi
Osamu Hayashi
Kazuo Okabashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP12191885A priority Critical patent/JPS61279852A/ja
Publication of JPS61279852A publication Critical patent/JPS61279852A/ja
Publication of JPH0456975B2 publication Critical patent/JPH0456975B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/075—Silicon-containing compounds
    • G03F7/0757—Macromolecular compounds containing Si-O, Si-C or Si-N bonds
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0388—Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
JP12191885A 1985-06-05 1985-06-05 感光性耐熱材料 Granted JPS61279852A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12191885A JPS61279852A (ja) 1985-06-05 1985-06-05 感光性耐熱材料

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12191885A JPS61279852A (ja) 1985-06-05 1985-06-05 感光性耐熱材料

Publications (2)

Publication Number Publication Date
JPS61279852A JPS61279852A (ja) 1986-12-10
JPH0456975B2 true JPH0456975B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-09-10

Family

ID=14823132

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12191885A Granted JPS61279852A (ja) 1985-06-05 1985-06-05 感光性耐熱材料

Country Status (1)

Country Link
JP (1) JPS61279852A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2606321B2 (ja) * 1988-10-06 1997-04-30 富士通株式会社 感光性耐熱樹脂組成物と半導体装置の製造方法
JPH10319597A (ja) * 1997-05-23 1998-12-04 Mitsubishi Electric Corp 感光性シリコーンラダー系樹脂組成物、この樹脂組成物にパターンを転写するパターン転写方法および上記樹脂組成物を用いた半導体装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5893240A (ja) * 1981-11-30 1983-06-02 Japan Synthetic Rubber Co Ltd 半導体装置及びその製造方法
JPS5869217A (ja) * 1981-10-22 1983-04-25 Japan Synthetic Rubber Co Ltd 感光性シリコ−ン樹脂組成物

Also Published As

Publication number Publication date
JPS61279852A (ja) 1986-12-10

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees