JPH0456068B2 - - Google Patents
Info
- Publication number
- JPH0456068B2 JPH0456068B2 JP61299589A JP29958986A JPH0456068B2 JP H0456068 B2 JPH0456068 B2 JP H0456068B2 JP 61299589 A JP61299589 A JP 61299589A JP 29958986 A JP29958986 A JP 29958986A JP H0456068 B2 JPH0456068 B2 JP H0456068B2
- Authority
- JP
- Japan
- Prior art keywords
- formula
- group
- polymer
- photosensitive
- polyimide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Compositions Of Macromolecular Compounds (AREA)
- Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
- Paints Or Removers (AREA)
- Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12593286 | 1986-06-02 | ||
JP61-125932 | 1986-06-02 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6399235A JPS6399235A (ja) | 1988-04-30 |
JPH0456068B2 true JPH0456068B2 (enrdf_load_stackoverflow) | 1992-09-07 |
Family
ID=14922528
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP29958986A Granted JPS6399235A (ja) | 1986-06-02 | 1986-12-16 | 感光性ポリイミド組成物 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6399235A (enrdf_load_stackoverflow) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02294649A (ja) * | 1989-05-09 | 1990-12-05 | Toray Ind Inc | 化学線感応性重合体組成物 |
JP2890491B2 (ja) * | 1989-07-04 | 1999-05-17 | 東レ株式会社 | 化学線感応性重合体組成物 |
JPH03188163A (ja) * | 1989-12-15 | 1991-08-16 | Toray Ind Inc | 感光性ポリイミド組成物 |
JP4898493B2 (ja) * | 2007-02-27 | 2012-03-14 | アンリツ産機システム株式会社 | 計量装置 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5952822A (ja) * | 1982-09-21 | 1984-03-27 | Toshiba Corp | 永久磁石の製造法 |
-
1986
- 1986-12-16 JP JP29958986A patent/JPS6399235A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6399235A (ja) | 1988-04-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0065352B1 (en) | Light-sensitive polymer composition | |
TWI254833B (en) | Positive type photosensitive polyimide resin composition | |
JP4400695B2 (ja) | 感光性樹脂組成物、硬化膜、保護膜、絶縁膜およびそれを用いた半導体装置、表示体装置 | |
EP1037112B1 (en) | Positive photosensitive resin precursor composition and process for producing the same | |
JPS59160139A (ja) | 感光性重合体組成物 | |
JP3064579B2 (ja) | パターン形成方法 | |
EP1705204B1 (en) | Photosensitive resin and a method of preparing the same | |
EP0878740B1 (en) | Radiation sensitive polymer composition | |
JPH0456068B2 (enrdf_load_stackoverflow) | ||
JPS6042425A (ja) | 化学線感応性重合体組成物 | |
JPH0658534B2 (ja) | 化学線感応性重合体組成物 | |
JP2003114538A (ja) | リンス液、リンス液を用いた洗浄方法、および洗浄の対象となる感光性樹脂前駆体組成物 | |
JPS63256663A (ja) | 感光性ポリイミド組成物 | |
JPS6337823B2 (enrdf_load_stackoverflow) | ||
JPH03115461A (ja) | 感光性樹脂組成物 | |
JPH05310933A (ja) | 溶媒可溶性ポリイミドの製造方法 | |
JPH0644154B2 (ja) | 有機溶媒可溶性のポジ型感光性ポリイミド組成物 | |
JPH0337652A (ja) | 化学線感応性重合体組成物 | |
JPH07116360B2 (ja) | ポリイミドコ−テイング剤組成物 | |
JPS63172767A (ja) | 光構造性ポリイミド混合物 | |
JP3163748B2 (ja) | 化学線感応性重合体組成物 | |
JP2917449B2 (ja) | 化学線感応性重合体組成物 | |
JPH0339357A (ja) | 化学線感応性重合体組成物 | |
JP3339134B2 (ja) | 化学線感応性重合体組成物 | |
JPS6399234A (ja) | ポリイミドコ−テイング剤組成物 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |