JPH0447957Y2 - - Google Patents

Info

Publication number
JPH0447957Y2
JPH0447957Y2 JP1983129846U JP12984683U JPH0447957Y2 JP H0447957 Y2 JPH0447957 Y2 JP H0447957Y2 JP 1983129846 U JP1983129846 U JP 1983129846U JP 12984683 U JP12984683 U JP 12984683U JP H0447957 Y2 JPH0447957 Y2 JP H0447957Y2
Authority
JP
Japan
Prior art keywords
ozone
ultraviolet
cleaning
cleaned
irradiation chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983129846U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6039240U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12984683U priority Critical patent/JPS6039240U/ja
Publication of JPS6039240U publication Critical patent/JPS6039240U/ja
Application granted granted Critical
Publication of JPH0447957Y2 publication Critical patent/JPH0447957Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Cleaning In General (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
JP12984683U 1983-08-24 1983-08-24 紫外線洗浄装置 Granted JPS6039240U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12984683U JPS6039240U (ja) 1983-08-24 1983-08-24 紫外線洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12984683U JPS6039240U (ja) 1983-08-24 1983-08-24 紫外線洗浄装置

Publications (2)

Publication Number Publication Date
JPS6039240U JPS6039240U (ja) 1985-03-19
JPH0447957Y2 true JPH0447957Y2 (enrdf_load_stackoverflow) 1992-11-12

Family

ID=30294075

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12984683U Granted JPS6039240U (ja) 1983-08-24 1983-08-24 紫外線洗浄装置

Country Status (1)

Country Link
JP (1) JPS6039240U (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0621236Y2 (ja) * 1985-03-28 1994-06-01 シャープ株式会社 半導体基板の洗浄装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT992983B (it) * 1972-08-18 1975-09-30 Gen Electric Metodo per asportare materiale fotoresistente da un supporto
JPS5588335A (en) * 1978-12-07 1980-07-04 Kokusai Electric Co Ltd Automatic conveying mechanism for plasma etching/ stripping device
JPS5858726A (ja) * 1981-10-05 1983-04-07 Hitachi Ltd 半導体処理装置

Also Published As

Publication number Publication date
JPS6039240U (ja) 1985-03-19

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