JPS6235811B2 - - Google Patents

Info

Publication number
JPS6235811B2
JPS6235811B2 JP58165149A JP16514983A JPS6235811B2 JP S6235811 B2 JPS6235811 B2 JP S6235811B2 JP 58165149 A JP58165149 A JP 58165149A JP 16514983 A JP16514983 A JP 16514983A JP S6235811 B2 JPS6235811 B2 JP S6235811B2
Authority
JP
Japan
Prior art keywords
cleaned
ultraviolet
support
supported
ultraviolet rays
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58165149A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6058238A (ja
Inventor
Kazuya Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Priority to JP58165149A priority Critical patent/JPS6058238A/ja
Publication of JPS6058238A publication Critical patent/JPS6058238A/ja
Publication of JPS6235811B2 publication Critical patent/JPS6235811B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • B08B7/0057—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by ultraviolet radiation

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Drying Of Semiconductors (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning In General (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP58165149A 1983-09-09 1983-09-09 紫外線洗浄方法 Granted JPS6058238A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58165149A JPS6058238A (ja) 1983-09-09 1983-09-09 紫外線洗浄方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58165149A JPS6058238A (ja) 1983-09-09 1983-09-09 紫外線洗浄方法

Publications (2)

Publication Number Publication Date
JPS6058238A JPS6058238A (ja) 1985-04-04
JPS6235811B2 true JPS6235811B2 (enrdf_load_stackoverflow) 1987-08-04

Family

ID=15806808

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58165149A Granted JPS6058238A (ja) 1983-09-09 1983-09-09 紫外線洗浄方法

Country Status (1)

Country Link
JP (1) JPS6058238A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109482577A (zh) * 2018-12-19 2019-03-19 烟台和锦电子有限公司 一种石英晶体谐振器管壳除油清洗装置及其使用方法

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63202921A (ja) * 1987-02-18 1988-08-22 Nec Kyushu Ltd 半導体基板洗浄装置
JPS63121A (ja) * 1987-06-17 1988-01-05 Wakomu:Kk 蒸気乾燥洗浄装置
TW260806B (enrdf_load_stackoverflow) * 1993-11-26 1995-10-21 Ushio Electric Inc
JPH09123206A (ja) * 1995-10-30 1997-05-13 Towa Kk 電子部品の樹脂封止成形装置
US6098637A (en) * 1998-03-03 2000-08-08 Applied Materials, Inc. In situ cleaning of the surface inside a vacuum processing chamber
DE10211611A1 (de) * 2002-03-12 2003-09-25 Zeiss Carl Smt Ag Verfahren und Vorrichtung zur Dekontamination optischer Oberflächen
CN104259128A (zh) * 2014-08-01 2015-01-07 苏州普京真空技术有限公司 一种晶振片清洗方法
CN112718692A (zh) * 2020-12-09 2021-04-30 四川富乐德科技发展有限公司 一种OLED坩埚部品LiF结晶物的清洗方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109482577A (zh) * 2018-12-19 2019-03-19 烟台和锦电子有限公司 一种石英晶体谐振器管壳除油清洗装置及其使用方法

Also Published As

Publication number Publication date
JPS6058238A (ja) 1985-04-04

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees