JPS6039240U - 紫外線洗浄装置 - Google Patents

紫外線洗浄装置

Info

Publication number
JPS6039240U
JPS6039240U JP12984683U JP12984683U JPS6039240U JP S6039240 U JPS6039240 U JP S6039240U JP 12984683 U JP12984683 U JP 12984683U JP 12984683 U JP12984683 U JP 12984683U JP S6039240 U JPS6039240 U JP S6039240U
Authority
JP
Japan
Prior art keywords
cleaned
cleaning device
cleaning equipment
ozone
ultraviolet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12984683U
Other languages
English (en)
Other versions
JPH0447957Y2 (ja
Inventor
一也 田中
Original Assignee
ウシオ電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ウシオ電機株式会社 filed Critical ウシオ電機株式会社
Priority to JP12984683U priority Critical patent/JPS6039240U/ja
Publication of JPS6039240U publication Critical patent/JPS6039240U/ja
Application granted granted Critical
Publication of JPH0447957Y2 publication Critical patent/JPH0447957Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【図面の簡単な説明】
第１図は本考案実施例の断面図、第２図は排気装置の断
面図、第３図はフィルターの断面図であ゛　る。

Claims (1)

    【実用新案登録請求の範囲】
  1. 紫外線ランプの光でオゾンを発生させ、このオゾンの分
    解により生成される発生基の酸素により被洗浄体の表面
    に付着する有機汚染物などを分解して洗浄する紫外線洗
    浄装置であって、洗浄終了より開扉までの所定時間内に
    、被洗浄体が支持される照射室をその容積の所定倍数の
    風量で換気が可能な排気装置を備えてなる紫外線洗浄装
    置。
JP12984683U 1983-08-24 1983-08-24 紫外線洗浄装置 Granted JPS6039240U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12984683U JPS6039240U (ja) 1983-08-24 1983-08-24 紫外線洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12984683U JPS6039240U (ja) 1983-08-24 1983-08-24 紫外線洗浄装置

Publications (2)

Publication Number Publication Date
JPS6039240U true JPS6039240U (ja) 1985-03-19
JPH0447957Y2 JPH0447957Y2 (ja) 1992-11-12

Family

ID=30294075

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12984683U Granted JPS6039240U (ja) 1983-08-24 1983-08-24 紫外線洗浄装置

Country Status (1)

Country Link
JP (1) JPS6039240U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61164030U (ja) * 1985-03-28 1986-10-11

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS503958A (ja) * 1972-08-18 1975-01-16
JPS5588335A (en) * 1978-12-07 1980-07-04 Kokusai Electric Co Ltd Automatic conveying mechanism for plasma etching/ stripping device
JPS5858726A (ja) * 1981-10-05 1983-04-07 Hitachi Ltd 半導体処理装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS503958A (ja) * 1972-08-18 1975-01-16
JPS5588335A (en) * 1978-12-07 1980-07-04 Kokusai Electric Co Ltd Automatic conveying mechanism for plasma etching/ stripping device
JPS5858726A (ja) * 1981-10-05 1983-04-07 Hitachi Ltd 半導体処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61164030U (ja) * 1985-03-28 1986-10-11

Also Published As

Publication number Publication date
JPH0447957Y2 (ja) 1992-11-12

Similar Documents

Publication Publication Date Title
SE8505616D0 (sv) Ventilationsanleggning
GB2035125B (en) Adsorbing organic pollutants in air sampling and cleaning
JPS6039240U (ja) 紫外線洗浄装置
JPS602537U (ja) 紫外線洗浄装置
CN203389533U (zh) 一种空气净化机
CN205402972U (zh) 一种负离子空气净化设备
JPS6043325U (ja) 紫外線洗浄装置
JPS6048237U (ja) 紫外線洗浄装置
JPS6043326U (ja) 紫外線洗浄装置
JPS6010649U (ja) エア−クリ−ナ
JPS6058236U (ja) Ｕｖ照射装置の冷却構造
CN217613866U (zh) 一种用于甲醛的净化装置
JPS6010648U (ja) エア−クリ−ナ
CN212348289U (zh) 一种除霾除甲醛杀菌智能机器人
JPS6039238U (ja) 紫外線洗浄装置
JPS5882831U (ja) 排オゾン処理装置
JPS602536U (ja) 紫外線洗浄装置
JPS6039239U (ja) 紫外線洗浄装置
JPS6025826U (ja) エア−クリ−ナ
JPS6137220U (ja) 空気高清浄装置
JPS629439U (ja)
KR950003545Y1 (ko) 공기청정기
JPS5983489U (ja) 歯ブラシ入れ
JPS6061040U (ja) 脱臭装置
JPH0222044Y2 (ja)