JPH0447956Y2 - - Google Patents

Info

Publication number
JPH0447956Y2
JPH0447956Y2 JP1985056644U JP5664485U JPH0447956Y2 JP H0447956 Y2 JPH0447956 Y2 JP H0447956Y2 JP 1985056644 U JP1985056644 U JP 1985056644U JP 5664485 U JP5664485 U JP 5664485U JP H0447956 Y2 JPH0447956 Y2 JP H0447956Y2
Authority
JP
Japan
Prior art keywords
box
furnace
opening
boat
core tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985056644U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61173132U (en, 2012
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985056644U priority Critical patent/JPH0447956Y2/ja
Publication of JPS61173132U publication Critical patent/JPS61173132U/ja
Application granted granted Critical
Publication of JPH0447956Y2 publication Critical patent/JPH0447956Y2/ja
Expired legal-status Critical Current

Links

JP1985056644U 1985-04-16 1985-04-16 Expired JPH0447956Y2 (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985056644U JPH0447956Y2 (en, 2012) 1985-04-16 1985-04-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985056644U JPH0447956Y2 (en, 2012) 1985-04-16 1985-04-16

Publications (2)

Publication Number Publication Date
JPS61173132U JPS61173132U (en, 2012) 1986-10-28
JPH0447956Y2 true JPH0447956Y2 (en, 2012) 1992-11-12

Family

ID=30580438

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985056644U Expired JPH0447956Y2 (en, 2012) 1985-04-16 1985-04-16

Country Status (1)

Country Link
JP (1) JPH0447956Y2 (en, 2012)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0732142B2 (ja) * 1986-02-14 1995-04-10 株式会社ディスコ 縦型半導体熱処理装置の外気混入防止装置
JPH0727875B2 (ja) * 1986-02-27 1995-03-29 株式会社ディスコ 縦型半導体熱処理装置への半導体基板の搬入出方法および外気混入防止装置
KR960001161B1 (ko) * 1987-09-29 1996-01-19 도오교오 에레구토론 사가미 가부시끼가이샤 열처리장치
JP2617947B2 (ja) * 1987-10-05 1997-06-11 東京エレクトロン株式会社 加熱装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5636130A (en) * 1979-08-31 1981-04-09 Nec Corp Manufacturing device of semiconductor
JPS5875840A (ja) * 1981-10-30 1983-05-07 Fujitsu Ltd 半導体用加熱処理炉
JPH07105356B2 (ja) * 1985-03-13 1995-11-13 株式会社東芝 縦型拡散炉装置

Also Published As

Publication number Publication date
JPS61173132U (en, 2012) 1986-10-28

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