JPH0447242B2 - - Google Patents
Info
- Publication number
- JPH0447242B2 JPH0447242B2 JP5707882A JP5707882A JPH0447242B2 JP H0447242 B2 JPH0447242 B2 JP H0447242B2 JP 5707882 A JP5707882 A JP 5707882A JP 5707882 A JP5707882 A JP 5707882A JP H0447242 B2 JPH0447242 B2 JP H0447242B2
- Authority
- JP
- Japan
- Prior art keywords
- measurement
- measured
- shape
- interferometer
- generatrix
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005259 measurement Methods 0.000 claims description 49
- 238000000034 method Methods 0.000 claims description 24
- 230000003287 optical effect Effects 0.000 claims description 13
- 238000010586 diagram Methods 0.000 description 7
- 238000003384 imaging method Methods 0.000 description 4
- 230000010363 phase shift Effects 0.000 description 4
- 230000004907 flux Effects 0.000 description 3
- 238000012937 correction Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000005304 joining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000004441 surface measurement Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5707882A JPS58173423A (ja) | 1982-04-05 | 1982-04-05 | 面形状測定方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5707882A JPS58173423A (ja) | 1982-04-05 | 1982-04-05 | 面形状測定方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58173423A JPS58173423A (ja) | 1983-10-12 |
| JPH0447242B2 true JPH0447242B2 (enrdf_load_stackoverflow) | 1992-08-03 |
Family
ID=13045430
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5707882A Granted JPS58173423A (ja) | 1982-04-05 | 1982-04-05 | 面形状測定方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58173423A (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6097205A (ja) * | 1983-11-01 | 1985-05-31 | Olympus Optical Co Ltd | 面形状測定器 |
| US4750141A (en) * | 1985-11-26 | 1988-06-07 | Ade Corporation | Method and apparatus for separating fixture-induced error from measured object characteristics and for compensating the measured object characteristic with the error, and a bow/warp station implementing same |
| CN105466354A (zh) * | 2015-12-21 | 2016-04-06 | 中国科学院长春光学精密机械与物理研究所 | 一种用于真空环境下的光学元件热应力评估系统 |
| WO2022225897A1 (en) * | 2021-04-20 | 2022-10-27 | Nikon Corporation | Systems and methods for measuring height properties of surfaces |
-
1982
- 1982-04-05 JP JP5707882A patent/JPS58173423A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58173423A (ja) | 1983-10-12 |
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