JPS58173423A - 面形状測定方法 - Google Patents

面形状測定方法

Info

Publication number
JPS58173423A
JPS58173423A JP5707882A JP5707882A JPS58173423A JP S58173423 A JPS58173423 A JP S58173423A JP 5707882 A JP5707882 A JP 5707882A JP 5707882 A JP5707882 A JP 5707882A JP S58173423 A JPS58173423 A JP S58173423A
Authority
JP
Japan
Prior art keywords
measured
measurement
interferometer
shape
interference fringes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5707882A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0447242B2 (enrdf_load_stackoverflow
Inventor
Masayuki Usui
臼井　正幸
Tsutomu Jin
神　力
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP5707882A priority Critical patent/JPS58173423A/ja
Publication of JPS58173423A publication Critical patent/JPS58173423A/ja
Publication of JPH0447242B2 publication Critical patent/JPH0447242B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP5707882A 1982-04-05 1982-04-05 面形状測定方法 Granted JPS58173423A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5707882A JPS58173423A (ja) 1982-04-05 1982-04-05 面形状測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5707882A JPS58173423A (ja) 1982-04-05 1982-04-05 面形状測定方法

Publications (2)

Publication Number Publication Date
JPS58173423A true JPS58173423A (ja) 1983-10-12
JPH0447242B2 JPH0447242B2 (enrdf_load_stackoverflow) 1992-08-03

Family

ID=13045430

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5707882A Granted JPS58173423A (ja) 1982-04-05 1982-04-05 面形状測定方法

Country Status (1)

Country Link
JP (1) JPS58173423A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6097205A (ja) * 1983-11-01 1985-05-31 Olympus Optical Co Ltd 面形状測定器
JPS62294905A (ja) * 1985-11-26 1987-12-22 エ−デイ−イ−・コ−ポレ−シヨン 対象物の測定方法及び装置
CN105466354A (zh) * 2015-12-21 2016-04-06 中国科学院长春光学精密机械与物理研究所 一种用于真空环境下的光学元件热应力评估系统
WO2022225897A1 (en) * 2021-04-20 2022-10-27 Nikon Corporation Systems and methods for measuring height properties of surfaces

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6097205A (ja) * 1983-11-01 1985-05-31 Olympus Optical Co Ltd 面形状測定器
JPS62294905A (ja) * 1985-11-26 1987-12-22 エ−デイ−イ−・コ−ポレ−シヨン 対象物の測定方法及び装置
CN105466354A (zh) * 2015-12-21 2016-04-06 中国科学院长春光学精密机械与物理研究所 一种用于真空环境下的光学元件热应力评估系统
WO2022225897A1 (en) * 2021-04-20 2022-10-27 Nikon Corporation Systems and methods for measuring height properties of surfaces

Also Published As

Publication number Publication date
JPH0447242B2 (enrdf_load_stackoverflow) 1992-08-03

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