JPH0444217Y2 - - Google Patents
Info
- Publication number
- JPH0444217Y2 JPH0444217Y2 JP1985153309U JP15330985U JPH0444217Y2 JP H0444217 Y2 JPH0444217 Y2 JP H0444217Y2 JP 1985153309 U JP1985153309 U JP 1985153309U JP 15330985 U JP15330985 U JP 15330985U JP H0444217 Y2 JPH0444217 Y2 JP H0444217Y2
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- spinner
- solvent
- coating liquid
- guide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011248 coating agent Substances 0.000 claims description 39
- 238000000576 coating method Methods 0.000 claims description 39
- 239000007788 liquid Substances 0.000 claims description 30
- 239000002904 solvent Substances 0.000 claims description 30
- 239000007789 gas Substances 0.000 description 5
- 239000003595 mist Substances 0.000 description 5
- 229910052787 antimony Inorganic materials 0.000 description 2
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000009931 harmful effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985153309U JPH0444217Y2 (it) | 1985-10-07 | 1985-10-07 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985153309U JPH0444217Y2 (it) | 1985-10-07 | 1985-10-07 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6262869U JPS6262869U (it) | 1987-04-18 |
JPH0444217Y2 true JPH0444217Y2 (it) | 1992-10-19 |
Family
ID=31072075
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1985153309U Expired JPH0444217Y2 (it) | 1985-10-07 | 1985-10-07 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0444217Y2 (it) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS636843A (ja) * | 1986-06-26 | 1988-01-12 | Dainippon Screen Mfg Co Ltd | 基板現像処理方法 |
JP2767308B2 (ja) * | 1990-01-25 | 1998-06-18 | 富士写真フイルム株式会社 | 光情報記録媒体の製造方法 |
JP5029486B2 (ja) | 2008-05-13 | 2012-09-19 | 東京エレクトロン株式会社 | 塗布装置、塗布方法及び記憶媒体 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57201564A (en) * | 1981-06-01 | 1982-12-10 | Dainippon Printing Co Ltd | Coating method |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6074775U (ja) * | 1984-09-13 | 1985-05-25 | 大日本スクリーン製造株式会社 | 回転式表面処理装置 |
-
1985
- 1985-10-07 JP JP1985153309U patent/JPH0444217Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57201564A (en) * | 1981-06-01 | 1982-12-10 | Dainippon Printing Co Ltd | Coating method |
Also Published As
Publication number | Publication date |
---|---|
JPS6262869U (it) | 1987-04-18 |
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