JPH0438355Y2 - - Google Patents
Info
- Publication number
- JPH0438355Y2 JPH0438355Y2 JP1986175401U JP17540186U JPH0438355Y2 JP H0438355 Y2 JPH0438355 Y2 JP H0438355Y2 JP 1986175401 U JP1986175401 U JP 1986175401U JP 17540186 U JP17540186 U JP 17540186U JP H0438355 Y2 JPH0438355 Y2 JP H0438355Y2
- Authority
- JP
- Japan
- Prior art keywords
- photomask
- alignment
- alignment mark
- marks
- boundary line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000206 photolithography Methods 0.000 claims description 7
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986175401U JPH0438355Y2 (no) | 1986-11-17 | 1986-11-17 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986175401U JPH0438355Y2 (no) | 1986-11-17 | 1986-11-17 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6380546U JPS6380546U (no) | 1988-05-27 |
JPH0438355Y2 true JPH0438355Y2 (no) | 1992-09-08 |
Family
ID=31114693
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986175401U Expired JPH0438355Y2 (no) | 1986-11-17 | 1986-11-17 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0438355Y2 (no) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5116878A (en) * | 1974-08-01 | 1976-02-10 | Fujitsu Ltd | Hoto masukuno seizohoho |
-
1986
- 1986-11-17 JP JP1986175401U patent/JPH0438355Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5116878A (en) * | 1974-08-01 | 1976-02-10 | Fujitsu Ltd | Hoto masukuno seizohoho |
Also Published As
Publication number | Publication date |
---|---|
JPS6380546U (no) | 1988-05-27 |
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