JPH0436726B2 - - Google Patents

Info

Publication number
JPH0436726B2
JPH0436726B2 JP61205883A JP20588386A JPH0436726B2 JP H0436726 B2 JPH0436726 B2 JP H0436726B2 JP 61205883 A JP61205883 A JP 61205883A JP 20588386 A JP20588386 A JP 20588386A JP H0436726 B2 JPH0436726 B2 JP H0436726B2
Authority
JP
Japan
Prior art keywords
exhaust gas
gas
reaction
introduction pipe
shower
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61205883A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6362528A (ja
Inventor
Masaru Wakatabe
Kenichi Fujimori
Osamu Ogino
Mitsuru Takei
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shindengen Electric Manufacturing Co Ltd
Yamanashi Electronics Co Ltd
Original Assignee
Shindengen Electric Manufacturing Co Ltd
Yamanashi Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shindengen Electric Manufacturing Co Ltd, Yamanashi Electronics Co Ltd filed Critical Shindengen Electric Manufacturing Co Ltd
Priority to JP61205883A priority Critical patent/JPS6362528A/ja
Publication of JPS6362528A publication Critical patent/JPS6362528A/ja
Publication of JPH0436726B2 publication Critical patent/JPH0436726B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Incineration Of Waste (AREA)
  • Treating Waste Gases (AREA)
JP61205883A 1986-09-03 1986-09-03 排気ガス処理装置 Granted JPS6362528A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61205883A JPS6362528A (ja) 1986-09-03 1986-09-03 排気ガス処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61205883A JPS6362528A (ja) 1986-09-03 1986-09-03 排気ガス処理装置

Publications (2)

Publication Number Publication Date
JPS6362528A JPS6362528A (ja) 1988-03-18
JPH0436726B2 true JPH0436726B2 (OSRAM) 1992-06-17

Family

ID=16514305

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61205883A Granted JPS6362528A (ja) 1986-09-03 1986-09-03 排気ガス処理装置

Country Status (1)

Country Link
JP (1) JPS6362528A (OSRAM)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05154334A (ja) * 1991-12-11 1993-06-22 Fujitsu Ltd 半導体製造装置の排気ポンプシステム
DE4320044A1 (de) * 1993-06-17 1994-12-22 Das Duennschicht Anlagen Sys Verfahren und Einrichtung zur Reinigung von Abgasen
TW342436B (en) 1996-08-14 1998-10-11 Nippon Oxygen Co Ltd Combustion type harm removal apparatus (1)
US5955037A (en) 1996-12-31 1999-09-21 Atmi Ecosys Corporation Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases
DE69921853T2 (de) * 1998-12-01 2005-12-08 Ebara Corp. Vorrichtung zur behandlung von abgas
JP2002166126A (ja) * 2000-12-04 2002-06-11 Sumitomo Seika Chem Co Ltd 燃焼排ガスの処理装置
GB0505852D0 (en) * 2005-03-22 2005-04-27 Boc Group Plc Method of treating a gas stream
JP4755526B2 (ja) * 2006-04-20 2011-08-24 田島応用化工株式会社 防水材
JP7285167B2 (ja) * 2019-08-22 2023-06-01 株式会社荏原製作所 排ガス処理装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59193522U (ja) * 1983-06-08 1984-12-22 日本電気株式会社 廃ガス洗浄処理装置

Also Published As

Publication number Publication date
JPS6362528A (ja) 1988-03-18

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