JPH043496Y2 - - Google Patents

Info

Publication number
JPH043496Y2
JPH043496Y2 JP1983164264U JP16426483U JPH043496Y2 JP H043496 Y2 JPH043496 Y2 JP H043496Y2 JP 1983164264 U JP1983164264 U JP 1983164264U JP 16426483 U JP16426483 U JP 16426483U JP H043496 Y2 JPH043496 Y2 JP H043496Y2
Authority
JP
Japan
Prior art keywords
arm
electrode
wafer
electrodes
semiconductor wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983164264U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6073232U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1983164264U priority Critical patent/JPS6073232U/ja
Publication of JPS6073232U publication Critical patent/JPS6073232U/ja
Application granted granted Critical
Publication of JPH043496Y2 publication Critical patent/JPH043496Y2/ja
Granted legal-status Critical Current

Links

JP1983164264U 1983-10-24 1983-10-24 ウエハロ−デング装置 Granted JPS6073232U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1983164264U JPS6073232U (ja) 1983-10-24 1983-10-24 ウエハロ−デング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1983164264U JPS6073232U (ja) 1983-10-24 1983-10-24 ウエハロ−デング装置

Publications (2)

Publication Number Publication Date
JPS6073232U JPS6073232U (ja) 1985-05-23
JPH043496Y2 true JPH043496Y2 (enExample) 1992-02-04

Family

ID=30360179

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1983164264U Granted JPS6073232U (ja) 1983-10-24 1983-10-24 ウエハロ−デング装置

Country Status (1)

Country Link
JP (1) JPS6073232U (enExample)

Also Published As

Publication number Publication date
JPS6073232U (ja) 1985-05-23

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