JPH0429640B2 - - Google Patents

Info

Publication number
JPH0429640B2
JPH0429640B2 JP60236899A JP23689985A JPH0429640B2 JP H0429640 B2 JPH0429640 B2 JP H0429640B2 JP 60236899 A JP60236899 A JP 60236899A JP 23689985 A JP23689985 A JP 23689985A JP H0429640 B2 JPH0429640 B2 JP H0429640B2
Authority
JP
Japan
Prior art keywords
wafer
processing
warpage
sliced
ingot
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60236899A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6296400A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=17007406&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JPH0429640(B2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed filed Critical
Priority to JP60236899A priority Critical patent/JPS6296400A/ja
Priority to US06/917,726 priority patent/US4756796A/en
Priority to CN86107119A priority patent/CN86107119A/zh
Priority to DE8686114697T priority patent/DE3686548T2/de
Priority to EP86114697A priority patent/EP0221454B1/en
Publication of JPS6296400A publication Critical patent/JPS6296400A/ja
Publication of JPH0429640B2 publication Critical patent/JPH0429640B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
    • B28D1/003—Multipurpose machines; Equipment therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • B28D5/0094—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being of the vacuum type
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/18—Epitaxial-layer growth characterised by the substrate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/959—Mechanical polishing of wafer

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Mining & Mineral Resources (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
JP60236899A 1985-10-23 1985-10-23 ウエハの製造方法 Granted JPS6296400A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP60236899A JPS6296400A (ja) 1985-10-23 1985-10-23 ウエハの製造方法
US06/917,726 US4756796A (en) 1985-10-23 1986-10-10 Method of producing wafer
CN86107119A CN86107119A (zh) 1985-10-23 1986-10-21 晶片的生产方法
DE8686114697T DE3686548T2 (de) 1985-10-23 1986-10-23 Verfahren zur herstellung von scheiben.
EP86114697A EP0221454B1 (en) 1985-10-23 1986-10-23 Method of producing wafers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60236899A JPS6296400A (ja) 1985-10-23 1985-10-23 ウエハの製造方法

Publications (2)

Publication Number Publication Date
JPS6296400A JPS6296400A (ja) 1987-05-02
JPH0429640B2 true JPH0429640B2 (OSRAM) 1992-05-19

Family

ID=17007406

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60236899A Granted JPS6296400A (ja) 1985-10-23 1985-10-23 ウエハの製造方法

Country Status (5)

Country Link
US (1) US4756796A (OSRAM)
EP (1) EP0221454B1 (OSRAM)
JP (1) JPS6296400A (OSRAM)
CN (1) CN86107119A (OSRAM)
DE (1) DE3686548T2 (OSRAM)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1229640B (it) * 1987-06-29 1991-09-04 S G S Microelettronica S P A O Processo di conformazione del bordo di fette di materiale semiconduttore e relativa apparecchiatura
DE3884903T2 (de) * 1987-10-29 1994-02-10 Tokyo Seimitsu Co Ltd Vorrichtung und Verfahren zum Abschneiden einer Halbleiterscheibe.
DE3737540C1 (de) * 1987-11-05 1989-06-22 Mueller Georg Nuernberg Verfahren und Maschine zum Herstellen von Ronden mit zumindest einer planen Oberflaeche
JPH0767692B2 (ja) * 1989-09-07 1995-07-26 株式会社東京精密 スライシングマシンの切断方法
US5189843A (en) * 1990-08-30 1993-03-02 Silicon Technology Corporation Wafer slicing and grinding machine and a method of slicing and grinding wafers
DE4134110A1 (de) * 1991-10-15 1993-04-22 Wacker Chemitronic Verfahren zum rotationssaegen sproedharter werkstoffe, insbesondere solcher mit durchmessern ueber 200 mm in duenne scheiben vermittels innenlochsaege und vorrichtung zur durchfuehrung des verfahrens
JPH05259016A (ja) * 1992-03-12 1993-10-08 Mitsubishi Electric Corp ウエハ作製用基板及び半導体ウエハの製造方法
JP2903916B2 (ja) * 1992-11-30 1999-06-14 信越半導体株式会社 半導体インゴット加工方法
WO2001046489A1 (en) 1999-12-21 2001-06-28 Trustees Of Boston University Ion beam modification of residual stress gradients in thin film polycrystalline silicon membranes
JP2002231665A (ja) * 2001-02-06 2002-08-16 Sumitomo Metal Ind Ltd エピタキシャル膜付き半導体ウエーハの製造方法
JP4232605B2 (ja) * 2003-10-30 2009-03-04 住友電気工業株式会社 窒化物半導体基板の製造方法と窒化物半導体基板
US7708251B2 (en) * 2006-03-17 2010-05-04 Nautilus, Inc. Mechanism and method for adjusting seat height for exercise equipment
EP2094439A2 (en) 2006-12-28 2009-09-02 Saint-Gobain Ceramics & Plastics, Inc. Sapphire substrates and methods of making same
CA2673660C (en) 2006-12-28 2012-07-24 Saint-Gobain Ceramics & Plastics, Inc. Sapphire substrates and methods of making same
US8740670B2 (en) 2006-12-28 2014-06-03 Saint-Gobain Ceramics & Plastics, Inc. Sapphire substrates and methods of making same
KR20160137681A (ko) 2006-12-28 2016-11-30 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 사파이어 기판
US20100037933A1 (en) 2008-08-12 2010-02-18 Harold John Hovel Solar cell panels and method of fabricating same
CN102808213A (zh) * 2012-08-21 2012-12-05 安阳市凤凰光伏科技有限公司 铸造法生产类似单晶大面积晶种制备方法
CN110453288A (zh) * 2018-05-08 2019-11-15 安徽科瑞思创晶体材料有限责任公司 一种消除晶体切割应力的化学腐蚀工艺
CN110227973B (zh) * 2019-07-09 2021-04-23 泰州左岸信息科技有限公司 一种性能稳定的玻璃打孔设备
JP7443053B2 (ja) * 2019-12-26 2024-03-05 株式会社ディスコ レーザー加工装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2382257A (en) * 1943-04-21 1945-08-14 Albert Ramsay Manufacture of piezoelectric oscillator blanks
US2886026A (en) * 1957-08-20 1959-05-12 Texas Instruments Inc Method of and apparatus for cutting a semiconductor crystal
US4084354A (en) * 1977-06-03 1978-04-18 International Business Machines Corporation Process for slicing boules of single crystal material
JPS54110783A (en) * 1978-02-20 1979-08-30 Hitachi Ltd Semiconductor substrate and its manufacture
US4228578A (en) * 1979-01-15 1980-10-21 Monsanto Company Method for off-orientation point rotation sawing of crystalline rod material
US4261781A (en) * 1979-01-31 1981-04-14 International Business Machines Corporation Process for forming compound semiconductor bodies
JPS58173609A (ja) * 1982-04-05 1983-10-12 株式会社東芝 薄片切断装置
JPS58179609A (ja) * 1982-04-14 1983-10-20 株式会社東芝 薄片切断装置
US4465550A (en) * 1982-06-16 1984-08-14 General Signal Corporation Method and apparatus for slicing semiconductor ingots
US4554717A (en) * 1983-12-08 1985-11-26 The United States Of America As Represented By The Secretary Of The Army Method of making miniature high frequency SC-cut quartz crystal resonators
JPS61106207A (ja) * 1984-10-31 1986-05-24 株式会社東京精密 ウエハー製造方法並びに装置
JPS61114813A (ja) * 1984-11-09 1986-06-02 日立精工株式会社 切断方法

Also Published As

Publication number Publication date
US4756796A (en) 1988-07-12
JPS6296400A (ja) 1987-05-02
DE3686548T2 (de) 1993-03-11
CN86107119A (zh) 1987-04-29
EP0221454A1 (en) 1987-05-13
DE3686548D1 (de) 1992-10-01
EP0221454B1 (en) 1992-08-26

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term